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HOx – Hot Oxidation System

Activair.cz > Products > Vacuum pumps and vacuum stations > Exhaust management > HOx – Hot Oxidation System
HOx – Hot Oxidation System - Exhaust management

The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Targeted at CVD applications, the system ensures safe removal of pyrophoric gases to below flammable limits and the effective treatment of acidic by-products to prevent exhaust duct corrosion.

Features and Benefits

  • Low capital cost
  • Low cost of ownership
    • No fuel
    • Low water use
    • Low power
    • Small footprint
  • Enhanced security
    • PLC controlled
    • Full system monitoring
    • Tool interface
    • SEMI S2-93 compliant
  • Superior design
    • High performance
  • Up to 4 independent self cleaning inlets
  • Unique oxidation chamber design increases destruction efficiencies while minimizing particulate deposition
  • Proven three stage wet scrubber (from the inward fired combustor range) provides blockage-free particulate entrapment and highly efficient acid gas removal
  • Novel construction on sliding platform provides easy servicing, resulting in lower maintenance requirements compared to competing units
  • Integral bypass valves available as optional extra feature
  • Integral water recirculation unit available as optional extra feature, to minimize utility consumption and COO

Applications

Ideal for most CVD applications including:
  • PECVD TEOS, BPSG, Oxide
  • PECVD Nitride
  • Tungsten CVD
  • LPCVD
Technical data  
Connections  
Process gas inlets NW40 SS, 4 inlets
Exhaust outlet 75mm flexible bellows
Nitrogen inlet 1/4" Swagelok ®
  Stainless steel 4-6 bar gauge
Water 3/4" bore PVC Pipe
PCW 3/4" bore PVC Pipe
(water recirculation unit)  
Power Requirements  
Supply Three phase 415/380v, 50Hz
Or Three phase 208v, 50/60Hz
Consumption Nominal 5kW
Mechanical Data  
Dimensions 1300x600x1835mm
Mass 400kg