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GX1000N

Activair.cz > Products > Vacuum pumps and vacuum stations > Semiconductor Pumps > GX Dry Pumps > GX1000N
GX1000N - GX Dry Pumps

The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

Features and Benefits

  • Reduced Cost of Ownership
    • Up to a 50% reduction in utilities cost compared to iL/iH drypumps
    • No preventative maintenance 
  • Flexible Installation Options
    • Small and light for easy installation
    • On-tool, close proximity, or remote
  • Possible Tool Throughput Improvements
    • One of the fastest loadlock pumps available
  • Consistent Pumping Performance Globally
    • Pumping speed identical at 50 and 60 Hz
  • Reduced Ambient Noise
    • Only 55 dB(A)
  • Wide Range of Peak Speed
    • 100, 300, 600 and 800 m3h-1

Applications

  • Load Lock
  • Transfer
  • Metrology
  • Lithography
  • PVD Process
  • PVD Pre-clean
  • RTA
  • Strip/Ashing
  • Oxide Etch
  • Metal Etch
  • Implant Source
Technical data  
Performance  
Peak speed 800 m3h-1
  471 ft3min-1
  13333 lmin-1
Ultimate pressure 1 x 10-3 mbar
  7.5 x 10-4 Torr
  0.10 Pa
Power at 700 Torr exhaust  
Ultimate 1.6 kW
AUC (Active Utility Controller) 1.05 kW
Water *  
Water inlet 2 slm
Nitrogen 4 or 14 slm **
Installation Details  
Footprint (excluding exhaust) 0.20 m2
Weight 230 kg
Inlet connection ISO 100
Outlet connection NW25
Noise at ultimate <55 dB(A)


* Requires Constant Flow Valve accessory
** Nitrogen purge can be manually adjusted to a maximum flow of 39slm