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STP-XA2703C

Activair.cz > Products > Vacuum pumps and vacuum stations > Turbomolecular pumps > STP Turbo Pumps > High Flow and High Throughput STP Pumps > STP-XA2703C
STP-XA2703C - High Flow and High Throughput STP Pumps

The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases.

Features and Benefits

  • Advanced rotor design  
    • Increased H2, N2 and Ar performance
    • Improved performance in the process pressure range of high vacuum to 2300 sccm
    • Maintenance free
  • 5-axis magnetic suspension system  
    • Zero contamination
    • Low vibration
  • Innovative torque management  
  • Patented torque reduction mechanism
  • Optimized temperature management  
    • High temperature TMS capability
    • Low deposition
    • Built-in cooling mechanism
    • Higher gas throughput heated and unheated
    • Optimized life
    • Harsh process compatible
  • Certifications  
  • SEMI® compliant, CE Marked and UL Listed

Applications

  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons
Technical data  
Inlet flange VG250
Pumping Speed  
N2 2650 ls-1
H2 2050 ls-1
Compression ratio  
N2 >108
H2 >6 x 103
Ultimate pressure 10-7 Pa
Max allowable backing pressure 266 Pa
Max allowable gas flow  
N2 (water cooled) 2300 sccm (3.8 Pam3s-1)
Ar (water cooled) 1900 sccm (3.2 Pam3s-1)
Rated speed 27500 rpm
Starting time 8 min
Mounting position Any orientation
Water cooling Flow 3 lmin-1
Water cooling Temperature 5-25 °C (41-77 °F)
Pressure 0.3 MPa
Recommended purge gas flow 50 sccm (8.4 x 10-2 Pam3s-1)
Input voltage 200 to 240 V a.c. (± 10)
Power consumption 1.5 kVA
Pump weight 75 kg (165 lb)
Controller weight 12 kg (26.4 lb)