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Activair s.r.o.
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Activair.cz > > > > > >
STP-XA2703C
The STP-XA2703C turbo pump offers high performance in the process range of high vacuum to 2300 sccm process flow with enhanced throughput for all gases.
Features and Benefits
- Advanced rotor design
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Increased H2, N2 and Ar performance
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Improved performance in the process pressure range of high vacuum to 2300 sccm
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Maintenance free
- 5-axis magnetic suspension system
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Zero contamination
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Low vibration
- Innovative torque management
- Optimized temperature management
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High temperature TMS capability
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Low deposition
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Built-in cooling mechanism
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Higher gas throughput heated and unheated
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Optimized life
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Harsh process compatible
- Certifications
- SEMI® compliant, CE Marked and UL Listed
Applications
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
| Technical data | |
| Inlet flange | VG250 |
| Pumping Speed | |
| N2 | 2650 ls-1 |
| H2 | 2050 ls-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | >6 x 103 |
| Ultimate pressure | 10-7 Pa |
| Max allowable backing pressure | 266 Pa |
| Max allowable gas flow | |
| N2 (water cooled) | 2300 sccm (3.8 Pam3s-1) |
| Ar (water cooled) | 1900 sccm (3.2 Pam3s-1) |
| Rated speed | 27500 rpm |
| Starting time | 8 min |
| Mounting position | Any orientation |
| Water cooling Flow | 3 lmin-1 |
| Water cooling Temperature | 5-25 °C (41-77 °F) |
| Pressure | 0.3 MPa |
| Recommended purge gas flow | 50 sccm (8.4 x 10-2 Pam3s-1) |
| Input voltage | 200 to 240 V a.c. (± 10) |
| Power consumption | 1.5 kVA |
| Pump weight | 75 kg (165 lb) |
| Controller weight | 12 kg (26.4 lb) |
- Edwards Maglev Turbos and the Environment Brochure (pdf, 1057KB)
