The processor controlled VSP Pirani vacuum transducer with robust helix filament is ideal for precise measurements in the fine vacuum range.
Measurement principles | Pirani |
---|---|
Gas dependency | depending on gas type |
Measuring range mbar | 1000 - 1e-4 mbar |
Measurement range Torr | 750 – 1e-4 Torr |
Measuring range Torr | 750 - 1e-4 Torr |
Max, Overpressure resistance | 10 bar abs., 16 bar abs. with CERT31P |
Accuracy | 1000 – 20 mbar: ca. 30 % f. r. | 20 – 0.002 mbar: 10 % f. r. |
Response time | 40 ms |
Repeatability | 20 – 0.002 mbar: 2 % f. r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | SubD 15pole, male |
Article Number (choice of vacuum connection) | DN 16 CF-F (VSP64), DN 16 ISO-KF (VSP63) |
Dimensions | 99 x 69 x 48 mm (VSP63) |
Protection class | IP40, IP54 mit connector XB15SL05 |
Weight (kg) | 190 g (VSP63) |
Output Signal SL | 0 – 10 VDC, min. 10 kΩ, measuring range 1,5 – 8,58 VDC, log. except EtherCAT, Profinet |
Switching output | 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet |
Electrical connection | SubD 15pole, male |
Bake out temperature | Max. 150°C at the flange (voltage supply switched-off) |
max. overload with CERT31P | up to 16 bar abs. |
Category | Vacuum transducer |
Output signal | 0-10 V |
Serial interfaces | RS485 |