Pirani, 1000-1e-4 mbar, metal sealed, DN16KF, display

VSP63DL

The processor controlled VSP Pirani vacuum transducer with robust helix filament is ideal for precise measurements in the fine vacuum range.

Measurement principles Pirani
Gas dependency depending on gas type
Measuring range mbar 1000 - 1e-4 mbar
Measurement range Torr 750 – 1e-4 Torr
Measuring range Torr 750 - 1e-4 Torr
Max, Overpressure resistance 10 bar abs., 16 bar abs. with CERT31P
Accuracy 1000 – 20 mbar: ca. 30 % f. r. | 20 – 0.002 mbar: 10 % f. r.
Response time 40 ms
Repeatability 20 – 0.002 mbar: 2 % f. r.
Materials in contact with vacuum Stainless steel 1.4307, tungsten, nickel, glass
Operating temperature +5…+60 °C
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection SubD 15pole, male
Article Number (choice of vacuum connection) DN 16 CF-F (VSP64), DN 16 ISO-KF (VSP63)
Dimensions 99 x 69 x 48 mm (VSP63)
Protection class IP40, IP54 mit connector XB15SL05
Weight (kg) 190 g (VSP63)
Output Signal SL 0 – 10 VDC, min. 10 kΩ, measuring range 1,5 – 8,58 VDC, log. except EtherCAT, Profinet
Switching output 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet
Electrical connection SubD 15pole, male
Bake out temperature Max. 150°C at the flange (voltage supply switched-off)
max. overload with CERT31P up to 16 bar abs.
Category Vacuum transducer
Output signal 0-10 V
Serial interfaces RS485