The Brooks CTI-Cryogenics intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.

On-Board IS cryopumps deliver highest uptime, best productivity, and lowest overall cost of ownership of any cryopump systems available today, backed by the Brooks highly responsive global service and support network.