The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.
Measurement principles | Combination sensors, Piezo, Pirani |
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Gas dependency | depending on gas type, independent of gas type (Piezo) |
Measuring range mbar | -1060 … +340 mbar (rel.), 0-10V Output |
Measurement range Torr | 900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr |
Max, Overpressure resistance | 4 bar abs. |
Accuracy | 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r. |
Response time | 40 ms |
Repeatability | 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Article Number (choice of vacuum connection) | DN 16 CF-F (VSL54), DN 16 ISO-KF (VSL53) |
Protection class | IP40, IP54 mit connector XB15SL05 |
Weight (kg) | 0,195 (VSL53) |
Power consumption | Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add. 1.6 W for Profinet |
Output Signal SL | 0 – 10 VDC, min. 10 kΩ, measuring range 1,5 – 8,58 VDC, log. except EtherCAT, Profinet |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Switching output | 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet |
Electrical connection | SubD 15pole, male |
Category | Vacuum transducer |
Output signal | 0-10 V |
Serial interfaces | RS485 |