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Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, Display

Activair.cz > Products > Vacuum measurement & control > Measurement > Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, Display
Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, Display
VSL53DL

The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.

Measurement principles Combination sensors, Piezo, Pirani
Gas dependency depending on gas type, independent of gas type (Piezo)
Measuring range mbar -1060 … +340 mbar (rel.), 0-10V Output
Measurement range Torr 900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr
Max, Overpressure resistance 4 bar abs.
Accuracy 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r.
Response time 40 ms
Repeatability 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r.
Materials in contact with vacuum Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide
Operating temperature +5…+60 °C
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Article Number (choice of vacuum connection) DN 16 CF-F (VSL54), DN 16 ISO-KF (VSL53)
Protection class IP40, IP54 mit connector XB15SL05
Weight (kg) 0,195 (VSL53)
Power consumption Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add. 1.6 W for Profinet
Output Signal SL 0 – 10 VDC, min. 10 kΩ, measuring range 1,5 – 8,58 VDC, log. except EtherCAT, Profinet
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Switching output 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet
Electrical connection SubD 15pole, male
Category Vacuum transducer
Output signal 0-10 V
Serial interfaces RS485