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EPX180L

Activair.cz > Products > Vacuum pumps and vacuum stations > Semiconductor Pumps > EPX Dry Pumps > EPX180L
EPX180L - EPX Dry Pumps

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of -5 Torr.

Features and Benefits

  • Compact footprint - as one of the smallest on-tool pumps available, the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred.
  • Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.
  • Unique patent protected pumping mechanism
  • Ultra clean mechanism
  • Extremely reliable
  • Network compatible

Applications

  • The EPX series covers a broad range of applications from wafer handling through to medium duty processes.
  • The EPX ‘L’ Series has been designed for use clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface.
Technical data  
Peak speed 170 m3h-1
  105 ft3min-1
  2835 lmin-1
Ultimate vacuum  
   <1 x 10-4 mbar
  <7,5 x 10-5 Torr
  <1 x 10-2 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO63
Outlet flange NW25
Noise  
Water connectors 3/8 in Quick
Minimum cooling water flow rate 2 lm-1
Cooling water temperature 15 – 35 °C
Electrical Supply 200/208 V, 50/60 Hz 3 phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM C3
Weight 43.5 kg