RX Series

In Mono/Single crystalline PV manufacturing applications, dust and particles can overwhelm conventional inlet vacuum filters. We have a Solar Market Specific solution.


  • PTFE Media: 99.97% removal efficiency standard to 0.3 micron
  • Integrated support stand with guides simplifies maintenance
  • Durable carbon or all stainless steel construction
  • High conductance design
  • Integrated Reverse Pulse Technology unloads and extends filter life improving maintenance intervals and up time
  • Dutch Twill Media: 99.5% nominal efficiency at 1 microns
  • Interchangeable cartridge provides for easy clean replacement
  • Helium leak testing ensures vacuum integrity
  • Vacuum level: Typically 1x10-3 mbar L/sec
  • Temp (continuous): PTFE: 220°F (104°C), PTFE w/silicone & Viton gaskets: 375°F (190°C), Dutch Twill: 375°F (190°C)
  • Large holding capacity extends maintenance intervals


  • Vacuum furnaces
  • Prevent particles from mixing with rotary piston lubricating oil
  • Safeguard pumps from dust particles and harmful SiO and SiO2
  • Dry screw, claw and booster vacuum pumps & systems
  • Protect the system from pump fluid or particulate backstreaming
  • Mono & single crystalline PV manufacturing
  • Metal degassing
  • Vacuum coating and lamination