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EPX500L

Activair.cz > Products > Vacuum pumps and vacuum stations > Semiconductor Pumps > EPX Dry Pumps > EPX500L
EPX500L - EPX Dry Pumps

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of -5 Torr.

Features and Benefits

  • Compact footprint - as one of the smallest on-tool pumps available, the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred.
  • Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.
  • Unique patent protected pumping mechanism
  • Ultra clean mechanism
  • Extremely reliable
  • Network compatible

Applications

  • The EPX series covers a broad range of applications from wafer handling through to medium duty processes. 
  • The EPX ‘L’ Series has been designed for use clean duty applications pumping inert gas mixtures.
Technical data  
Peak speed 500 m3h-1
  295 ft3min-1
  8338 lmin-1
Ultimate vacuum  
  <1 x 10-6 mbar
  <7 x 10-7 Torr
  <1 x 10-4 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO160
Outlet flange NW25
Noise <59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 – 35 °C
Electrical Supply 200/208 V, 50/60 Hz 3 phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM C3
Weight 45.2 kg