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EH2600FX
The EH mechanical booster pump, based on the simple Roots principle, remains the favourite pump for applications where high pumping speeds are required for pressures in the region of 0.01 to 10 mbar. This pump must always be backed by another pump, which can deliver against a high-pressure differential to atmospheric pressure.
Operating at relatively low pressures, the mechanical booster pump is not exposed to the same concentrations of corrosive process media as is the backing pump, which makes it highly reliable.
The EH2600FX pump is supplied for use with PFPE oil. This enables them to be used in harsh (corrosive) processes, or where the presence of Oxygen will result in rapid degradation of hydrocarbon oils. Fomblin® must be purchased separately for PFPE prepared pumps.
Edwards recommends that the EH2600FX pump should NOT run continuously on pressures >10 mbar.
Features and Benefits
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Suitable for applications where high pumping speeds over 3000 m3h-1/1776 ft3min-1 are required in the pressure region of 0.01 to 50 mbar/0.0075 to 37.5 Torr.
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Operating at relatively low pressures makes it highly reliable.
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The EH pumps have a high quality, oil-free pumping mechanism. This offers:
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Quiet, vibration free operation.
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Rugged and corrosion resistant.
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Advanced shaft-seal technology with no oil contamination of the process chamber
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The corrosion resistant pumping mechanism is manufactured from high grade cast iron.
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The proven shaft-seal arrangement ensures that no oil enters the pumping stator, and the absence of internal and external by-pass lines and valves which may corrode or stick minimizes maintenance requirements.
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The design of the shaft seals is optimized to ensure that no lubricants can migrate into the pumping mechanism. This maintains booster pump performance in applications which demand the highest standard of cleanliness. In addition, this prevents the build-up of trapped particles on the rotor lobes and end-faces which have very close tolerances.
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The dynamically balanced rotors and precision ground gears contribute to the smooth, quiet operation of the pumps, as demanded by manufacturers of advanced technology equipment.
Applications
- Semiconductor processing
- Vacuum distillation
- Vacuum packaging
- Steel de-gassing
- Thin film coating
- Vacuum metallurgy
- Low density wind tunnels
- Space simulation
- Vacuum impregnation
- Oil drying and de-gassing
- Pharmaceutical freeze drying
- CO2 lasers
| Technical data | |
| Displacement (swept volume) | |
| 50Hz | 2590 m3h-1 / 1525 ft3min-1 |
| 60Hz | 3110 m3h-1 / 1830 ft3min-1 |
| Effective pumping speed with backing pump | |
| E2M175 | 1750 m3h-1 / 1031 ft3min-1 |
| E2M275 | 1900 m3h-1 / 1119 ft3min-1 |
| Pressure differential across pump | |
| 50Hz | 0-120 mbar / 0-90 Torr |
| 60Hz | 0-67 mbar / 0-50 Torr |
| Inlet connection | ISO160 |
| Outlet connection | ISO100 |
| Rotational speed | |
| 50Hz | 0-2900 rpm |
| 60Hz | 0-3500 rpm |
| Operating continuous inlet pressure | 0-1000 mbar / 0-760 Torr |
| Maximum outlet pressure | 1000 mbar / 760 Torr |
| Recommended backing pumps | GXS250, GXS450, E2M175, E2M275 |
| Electrical supply | |
| 50Hz | 220-240V / 380-415V |
| 60Hz | 208-230V / 460V |
| Motor power | |
| Hydrocarbon | 11kW / 15hp |
| PFPE | 11kW / 15hp |
| ATEX | 11kW |
| Explosion proof | 15hp |
| Ambient temperature range | |
| Operating | 5 to 40°C / 40 to 104°F |
| Storage | -10 to 80°C / 14 to 176°F |
| Maximum operating humidity | 90% RH |
| Recommended cooling water supply pressure | 2-6 bar |
| Cooling water connections | 3/8 inch BSP male |
| Recommended oil | |
| Standard version | Ultragrade 20 |
| PFPE version | Fomblin® YVAC 16/6 |
| Oil capacity | |
| Gear case | 3.5 litre |
| Coupling cover | 6.5 litre |
| Shaft seal reservoir | 1.5 litre |
| Weight | 345 kg |
- Chemical Process Industries Brochure (pdf, 997KB)