| Technical data | |
| Smallest detectable leak rate | 5 x 10-13 Pa . m3/s |
| Measuring Range | 10-13 ˜ 10-1Pa . m3/s |
| Maximum inlet pressure | 1800 Pa |
| Response time | 0,3 s |
| Run-up Time | |
| Power |
230 V ± 10% / 50 Hz 120 V ± 10% / 60 Hz, 10A |
| Operation Ambient |
10˜35°C relative humidity ≤ 80% |
| Dimensions |
550 x 460 x 304 mm (L x W x H) |