The STP-iXA2206 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STP-iXA2205 series.
|Inlet flange size||ISO250F/VG250/ICF305|
|Backing port size||KF40|
|Pump speed N2/Ar||2200/1900 ls-1|
|Compression ratio N2/H2||>108 / 1 x 104|
|Ultimate pressure||10-7 Pa (10-9 Torr)|
|Allowable backing pressure||266 Pa (2 Torr)|
|Max gas flow N2 * (water cooled only)||3000 sccm (5.07 Pam3s-1)|
|Max gas flow Ar * (water cooled only)||1400 sccm (2.36 Pam3s-1)|
|Rated speed||27000 rpm|
|Run-up time to 90% rated speed||<8 minutes|
|Mounting position||Any orientation|
|Input voltage||200-240 V|
|Max input power (without TMS)||1200 VA|
* The maximum gas flow is applicable under conditions that N2 or Ar gas is pumped continuously with water cooling temperature between 15-25 °C and the backing pump (10,000 l/min size) is used. It is changed on condition.