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On-Board® Cryopumps

Activair.cz > Products > Vacuum pumps and vacuum stations > Cryopumps > On-Board® Cryopumps
On-Board® Cryopumps - Cryopumps

The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.

Key Features

  • Fast Regen™ capability that extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
  • An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
Technical data                
On-Board Cryopump Model 4F 8 8F 10 10F 250F 400 500
Pumping Speeds - liters/sec.
Water Vapor 1,100 4,000 4,000 9,000 9,500 6,500 17,500 30,000
Air 370 1,500 1,500 3,000   2,200 6,000 10,000
Hydrogen 370 2,500 2,200 5,000   3,200 12,000 12,000
Argon 310 1,200 1,200 2,500   1,800 5,000 8,400
 
Capacity - std. liter
Argon 210 1,000 1,000 2,000   1,000 2,500 6,000
Hydrogen (5x10-6 Torr) 3 17 12 24 24 16 42 45
 
Nominal Regeneration Time (cold to cold)
First & Second Stage 75 min. 2.5 hrs 2.5 hrs 2.5 hrs 2.5 hrs 3 hrs 
Second Stage