A compact Active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6 x 10-2 to 6.6 x 10-10 mbar (5 x 10-2 to 5 x 10-10 Torr) and a 1 Volt/decade linear output.
The new AIGX gauge from Edwards incorporates all the benefits of the industry standard Active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.
The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.
Technical data | |
Pressure range | 6.6 x 10-2 to 6.6 x 10-10 mbar |
(5 x 10-2 to 5 x 10-10 Torr) | |
Power supply | +14.5 to +30.0 V d.c. |
Power consumption | Normal operation: 7W (Max), |
Degas: 14W (Max) | |
Output signal | Linear, 1 Volt / decade |
Response time | 1.33 x 10-8 mbar |
(>10-8 Torr) ˜ 100 ms | |
1.33 x 10-8 mbar | |
(<10-8 Torr) ˜ 1-2 s | |
Maximum voltage | 30 V d.c. |
Maximum current | 100 mA max |
Operating environment | Dry non conductive atmosphere |
Temperature range | |
Operating temperature | 0 to +40 °C |
Storage temperature | -30 to +70 °C |