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- Products
- Vacuum pumps and vacuum stations
- Dry vacuum pumps (R&D)
- Rotary vane pumps
- Turbomolecular pumps
- T-Station
- Diaphragm Pumps
- D-LAB
- GEMINI
- MP (physical applications)
- MPC (chemical applications)
- ATEX Approved MPC
- MPC (ultimate pressure less than 2 mbar)
- MPC (ultimate pressure less than 75 mbar)
- MPC 090 E, 90...260VAC /18VDC
- MPC 110 E, 90...260VAC /24V
- MPC 1201 E, 230/400V 50/60Hz
- MPC 1201 E, 230V 50/60Hz
- MPC 201 E, 230V 50/60Hz
- MPC 2401 E, 230/400V 50/60Hz
- MPC 2401 E, 230V 50/60Hz
- MPC 301 E, 230V 50/60Hz
- MPC 302 E, 230V 50/60Hz
- MPC 601 E, 230/400V 50/60Hz
- MPC 601 E, 230V 50/60Hz
- MPC 602 E, 230/400V 50/60Hz
- MPC 602 E, 230V 50/60Hz
- MPC (ultimate pressure less than 8 mbar)
- XDD1
- Ion and Getter Pumps
- Cryopumps
- Chemical pumps
- Semiconductor Pumps
- Claw vacuum pumps
- Dry vacuum pumps (GV)
- Diffusion Pumps
- Mechanical Boosters
- EH Mechanical Booster Pumps
- HV mechanical boosters pumps
- Stokes 1700
- Stokes 6"
- 607 5H10
- 607 5HR
- 607 5HR CE 7.5kW
- 607 5V10
- 607 5VR
- 607 5VR CE 7.5kW
- 607 MH05
- 607 MH20
- 607 MHR
- 607 MHR CE
- 607 MV05
- 607 MV20
- 607 MVR
- 607 MVR CE
- 615 5H15
- 615 5HR
- 615 5HR CE 11kW
- 615 5V15
- 615 5VR
- 615 5VR CE 11kW
- 615 MH10
- 615 MH15
- 615 MHR
- 615 MHR CE
- 615 MV10
- 615 MV15
- 615 MVR
- 615 MVR CE
- 61B 5H25
- 61B 5HR
- 61B 5HR CE 18.5kW
- 61B 5V25
- 61B 5VR
- 61B 5VR CE 18.5kW
- 61B MH10
- 61B MH25
- 61B MHR
- 61B MHR CE
- 61B MV10
- 61B MV25
- 61B MVR
- 61B MVR CE
- 622 5H25
- 622 5HR
- 622 5HR CE 18.5kW
- 622 5V25
- 622 5VR
- 622 5VR CE 18.5kW
- 622 MH25
- 622 MHR
- 622 MHR CE
- 622 MV25
- 622 MVR
- 622 MVR CE
- Exhaust management
- Vacuum valves
- Air admittance valves
- Ball valves
- Electromagnetic valves
- Manual valves
- Pneumatic valves
- Speedivalve
- Vacuum measurement & control
- Digital Controllers
- Gauges
- Measurement
- 1 channel, 115V, for Analogline transducers with 4-20 mA output, USB, analog output 0-1 V / 0-10V
- 1 channel, 230V, for Analogline transducers with 4-20 mA output, USB, analog output 0-1 V / 0-10V
- 2 channels, 95 - 265V, for Smartline transducers and Analogline transducers with 0-10 V output, USB interface and RS232 interface
- 4 channels, 1200-5e-10 mbar, for Smartline transducers and Analogline transducers with 0-10 V output, USB interface and RS232 interface
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, display
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, EtherCAT
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, Profinet
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF, display
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF, EtherCAT
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF, Profinet
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF, display
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF, EtherCAT
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF, Profinet
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF, display
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF, EtherCat
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF, Profinet
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40 CF, EtherCat
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40 CF, Profinet
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40CF
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40CF, display
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, display
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, EtherCat
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, Profinet
- Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN25KF
- Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN25KF, display
- Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN40CF
- Piezo / Pirani, 1200-5e-4 mbar, USB-interface
- Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, Display
- Piezo, 1600-1 mbar, DN16KF with G1/4 female thread, USB-interface
- Pirani external, 100-1e-3 mbar, 1/8" NPT-thread USB-interface
- Pirani external, 100-1e-3 mbar, DN16KF, USB-interface
- Pirani, 100-5e-4 mbar, metal sealed, DN16KF USB-interface
- Pirani, 1000-1e-4 mbar, metal sealed, DN16KF, display
- Leak detection
- Oils and fluids
- Blowers
- Laboratory technique
- Filtration
- Inlet Vacuum Pump Filters
- CT Series 1" - 6" BSPP
- CSL Series 3" - DN300 BSPT, Flange
- CSL Series 3/8" - 3" BSPP
- FST Series 1½" - 8" Multi-App Filters
- ISO CSL Series NW16 - NW40 Flg (Black Finish)
- ISO Flg Vacuum Filters, CSL Series (Electroless Nickel Finish)
- IVPL Series 3"-12" Lateral Access "L" Style Filters
- IVPS Series 3"-12" Lateral Access Straight Through Style
- SpinMeister ST Series
- ST Series, See-Through Vacuum Filter
- VL Series 3"- 6" MPT (BSPT)
- VL Series 4" - 6" Flange
- VS Series 3" - 6" MPT (BSPT)
- VS Series, 4" - 6" Flange
- Inlet Filter Assemblies
- Big Boy F Series DN200 - DN300 Flange
- CSS Series 1/4" - 1"
- F Series 3" - 6" BSPT
- F Series DN80 - DN150
- FT Series 1/2" - 3" BSPT
- FT Series 3" - 6" Flange
- FT Series DN200 - DN300, Flange PN10
- FT Series DN80 - DN150, PN10 & 16
- SM Series 1"- 2-1/2"SpinMeister Extreme Duty Filters
- SM Series 1/2" - 1" SpinMeister
- SM Series 4" SpinMeister Extreme Duty Filters
- SM Series DN125 - DN300 SpinMeister Extreme Duty Filters
- Inlet Filter Silencers
- Sumo Class Filter Silencers
- BBF Series 2"-6" Silencer Frame for PD Blowers
- Belt Guard for BBF Series Base Frame
- Big Boy Filter Silencers, QB Series DN200 - DN300
- Big Boy FS Series 6"-14" Flange Filter Silencers
- EFS Series-Discharge Silencer
- FS Series 1/2" - 3" Filter Silencers
- FS Series 1/4"-1" Filter Silencers
- FS Series 3" - 6" Filter Silencers
- FS Series DN80 - DN150, PN Pattern Flange
- LQB Series 3" BSPT - DN300 Flg
- Multibarrel Filter Silencers
- PS Series Plastic Filter Silencers
- QB Series Compact Filter Silencers
- QB Series DN80 - DN150 Filter Silencers
- SLCR / SLCRT Series 1/2" - 4" FPT (BSPP) Silencers
- Snubber Discharge/Intake Silencer
- Air / Oil Separators
- ATS Series Vacuum Discharge Sump & Separator Tank
- Crankcase Ventilation System
- CVB Series
- CVH Series, Static Vent Breathers
- EE/SV Series 3/8" BSPP, ISO Flg
- EF Series 1/2" - 1 3/4", ISO Flanges
- EFDB Series
- HDL Series 1" - 2 1/2" BSPP
- HDL Series 3" BSPT - DN200 Flange
- Suction Scrubber Vessels
- VAE Series, Vacuum Assisted Oil Mist Eliminator
- Filter Elements
- Wire Mesh Elements, "S" Media
- 1 Micron Polyester Elements, "Z" Media
- 100 Micron Polyester Elements, "W" Media
- 25 Micron Polyester Elements, "U" Media
- 4 Micron Polyester Elements, "N" Media
- ACG Media
- Activated Alumina Elements, "AA" Media
- Activated Carbon Elements, "AC" Media
- Blower Filter Elements, 32 Series
- Coalescing Elements for Oil Mist Eliminators
- Compact / Big Boy Series Replacement Element
- Electrostatic, Odor Adsorptive Elements, "GM" Media
- HEPA Elements w/SS ID/OD, "HE" Media
- HEPA Elements w/SS ID/OD/EC, "HE" Media
- HEPA Elements, "HE" Media
- Hockey Puck Filter Elements for Miniature Filter Assemblies
- J Series, Polyester/Paper Media with SS ID/OD
- K Series, Polyester/Paper Media with SS ID/OD
- Low Pressure Drop WP Media Coalescing Elements
- Nomex Elements, "MX" Media
- Polypropylene Elements, "Y" Media
- Polyurethane Foam Elements, "FXF" Media
- PPS Elements, "RY" Media
- PTFE Elements, "TF" Media
- Q Series, Polyester/Paper Media with SS ID/OD/EC
- R Series, Polyester/Paper Media with SS ID/OD/EC
- Replacement Elements 60 - 510 m3/h Flow Range
- Small Vacuum Pump Elements, 800 Series
- Special Sized Filter Elements
- SS Nomex Element, "MXD" Media
- SS Screen Elements, "XXWSS" Media
- SS Wire Mesh Elements, "S2" Media
- Top Hat Style Separators, 51 Series
- ULPA "UL" Media
- Parts/Accessories
- Specialty Applications
- Inlet Vacuum Pump Filters
- Spare Parts
- Vacuum pumps and vacuum stations
- Services
- Markets
- Research and Development
- Vývoj zařízení pro prostorovou dezinfekci pomocí HOCl s pokročilým řídícím software
- Držák vzorku pro moderní depoziční procesy
- Výzkum a vývoj elektrovodivých keramických kompozitních povlaků
- Technologie kombinovaného zdroje plasmatu pro vznik pokročilých povrchových úprav
- Bezobslužné vakuové zařízení pro servis transformátorů
- Glass-ceramic innovation ecosystem for implementation of new research directions in applications (GlaCerHub)
- Inteligentní imisní měření v okolí produktovodů a průmyslových aplikací pomocí dronu
- Vývoj centrální jednotky pro vakuové systémy odpadních vod
- Výzkum a vývoj filtračního zařízení pro elektroizolační kapaliny s využitím vysoce funkčních keramických materiálů
- Výzkum a vývoj pokročilého interakčního vakuového systému pro laserovou spektroskopii
- Výzkum a vývoj technologie pro výrobu vakuových komponent nekonvenčními postupy
- Technical Information
- Download
STPH451C
High performance STPH451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility.
Features and Benefits
- Advanced rotor technology
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Higher gas throughput
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
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Harsh process compatible
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Increased life
- Advanced controller design
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Auto tuning
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Self diagnostic functions
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d.c. motor drive
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Battery-free operation
- Compact design
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Small footprint
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Half rack controller
- 5 axis magnetic suspension system
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Zero contamination
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Low maintenance
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Any orientation operation
Applications
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
| Technical data | |
| Inlet flange | ISO160K |
| Outlet port | KF40 |
| Purge port | KF10 |
| Water cooling fitting | PT1/4 |
| Pumping Speed | |
| N2 | 450 ls-1 |
| H2 | 300 ls-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | 103 |
| Ultimate pressure with bake out heating | 10-7 Pa (10-9 Torr) |
| Max continuous outlet pressure | 660 Pa (5 Torr) |
| Max Nitrogen throughput | 2500 sccm |
| Rated speed | 48000 rpm |
| Starting time | 4 min |
| Max inlet flange temperature | 120 °C |
| Input voltage | 100 to 120 (± 10) V a.c. or |
| 200 to 240 (± 10) V a.c. | |
| Power consumption | 0.6 kVA |
| Pump weight | 15 kg |
| Controller weight | 9 kg |
- Edwards Maglev Turbos and the Environment Brochure (pdf, 1057KB)