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STP-iX455

Activair.cz > Products > Vacuum pumps and vacuum stations > Turbomolecular pumps > STP Turbo Pumps > STP Pump with Integrated Controller > STP-iX455
STP-iX455 - STP Pump with Integrated Controller

The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.

The pump features 450 ls-1 pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.

Features and Benefits

  • Compact Design including a fully integrated controller
  • Inovative, Self-Sensing magnetic bearing system
  • Digital 5-axis control
  • Vibration levels reduced by 50% compared to the existing turbo pumps
  • Can be configured to run corrosive processes
  • Automatic Balancing System (ABS) standard
  • Automatic Vibration Reduction (AVR) standard
  • UL Listed, CE marked and SEMI® S2 compliant

Applications

  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons
Technical data    
Inlet flange ISO100K/DN100CF ISO160K/DN160CF
Pumping Speed    
N2 300 ls-1 450 ls-1
H2 300 ls-1 460 ls-1
Compression ratio    
N2 >108 >108
H2 >1 x 104 >1 x 104
Ultimate pressure 6.5x10-6  (5x10-8) 10-8 (10-10)
Weight 15 kg 16 kg

 

   
Max working pressure 1.3 x 10-1 Pa
Allowable backing pressure 67 Pa
Rated speed 55000 rpm
Starting time  
Mounting position Any orientation
Cooling method Natural cooling (Air cooling fan when baking or gas pumping)
Lubricating oil Not necessary
Backing pump 240 lmin-1
Leakage Magnetic Flux  
Axial direction  
Radial direction  
Ambient temperature range 0 to 40 °C
Storage temperature range -25 to 55 °C