The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
The pump features 450 ls-1 pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.
Technical data | ||
Inlet flange | ISO100K/DN100CF | ISO160K/DN160CF |
Pumping Speed | ||
N2 | 300 ls-1 | 450 ls-1 |
H2 | 300 ls-1 | 460 ls-1 |
Compression ratio | ||
N2 | >108 | >108 |
H2 | >1 x 104 | >1 x 104 |
Ultimate pressure | 6.5x10-6 (5x10-8) | 10-8 (10-10) |
Weight | 15 kg | 16 kg |
Max working pressure | 1.3 x 10-1 Pa |
Allowable backing pressure | 67 Pa |
Rated speed | 55000 rpm |
Starting time | |
Mounting position | Any orientation |
Cooling method | Natural cooling (Air cooling fan when baking or gas pumping) |
Lubricating oil | Not necessary |
Backing pump | 240 lmin-1 |
Leakage Magnetic Flux | |
Axial direction | |
Radial direction | |
Ambient temperature range | 0 to 40 °C |
Storage temperature range | -25 to 55 °C |