Headquarters
- Activair s.r.o.
Ostravská 311/7
747 70 Opava-Komárov
Czech Republic
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| Fax: | +420 226 013 984 |
| E-mail: | |
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Branch Brno
- Activair s.r.o.
Bohunická 728/24a
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Czech Republic
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| Fax: | +420 226 013 984 |
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Branch Praha
-
Activair s.r.o.
Novodvorská 803/82
142 00 Praha 4 – Lhotka
Czech Republic
| Tel: | +420 222 362 288
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Activair.cz > > > > > >
STP-L301
Corrosion resistant STP-L301(C) is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility.
Features and Benefits
- Advanced rotor technology
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
- Advanced controller design
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Auto tuning
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Self diagnostic functions
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d.c. motor drive
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Battery-free operation
- Compact design
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Small footprint
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Half rack controller
- Low vibration
- Built in vibration isolation system gives improved performance over STP301C and external isolator.
Applications
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
| Technical data | |
| Inlet flange | ISO100, CF100 |
| Outlet port | KF25 |
| Purge port | KF10 |
| Pumping Speed | |
| N2 | 260 ls-1 |
| H2 | 290 ls-1 |
| Compression ratio | |
| N2 | >108 |
| He | 5 x 105 |
| H2 | 2 x 104 |
| Ultimate pressure with bake out heating (VG/ISO flange) | 6.5 x 10-6 Pa (5 x 10-8 Torr) |
| Ultimate Pressure with bake out heating (ICF flange) | 10-8 Pa (10-10 Torr) |
| Max allowable inlet pressure ambient cooled | 6.7 x 10-2 Pa (5 x 10-4 Torr) |
| Max continuous outlet pressure ambient cooled | 13 Pa (0.1 Torr) |
| Rated speed | 48000 rpm |
| Starting time | 3 min |
| Maximum inlet flange temperature | 120 °C |
| Input voltage | 100 to 120 (± 10) V a.c. or |
| 200 to 240 (± 10) V a.c. | |
| Power consumption at start up | 0.55 kVA |
| Pump weight | 13 kg |
| Controller weight | 7 kg |
- Edwards Maglev Turbos and the Environment Brochure (pdf, 1057KB)
