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STP-L301

Activair.cz > Products > Vacuum pumps and vacuum stations > Turbomolecular pumps > STP Turbo Pumps > Low Vibration Vacuum STP Pumps > STP-L301
STP-L301 - Low Vibration Vacuum STP Pumps

Corrosion resistant STP-L301(C) is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility.

Features and Benefits

  • Advanced rotor technology  
    • Maximized process flexibility
    • Oil free
    • Low vibration
    • High reliability
    • Maintenance free
  • Advanced controller design  
    • Auto tuning
    • Self diagnostic functions
    • d.c. motor drive
    • Battery-free operation
  • Compact design  
    • Small footprint
    • Half rack controller
    • Low vibration 
  • Built in vibration isolation system gives improved performance over STP301C and external isolator.

Applications

  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons
Technical data  
Inlet flange ISO100, CF100
Outlet port KF25
Purge port KF10
Pumping Speed  
N2 260 ls-1
H2 290 ls-1
Compression ratio  
N2 >108
He 5 x 105
H2 2 x 104
Ultimate pressure with bake out heating (VG/ISO flange) 6.5 x 10-6 Pa (5 x 10-8 Torr)
Ultimate Pressure with bake out heating (ICF flange) 10-8 Pa (10-10 Torr)
Max allowable inlet pressure ambient cooled 6.7 x 10-2 Pa (5 x 10-4 Torr)
Max continuous outlet pressure ambient cooled 13 Pa (0.1 Torr)
Rated speed 48000 rpm
Starting time 3 min
Maximum inlet flange temperature 120 °C
Input voltage 100 to 120 (± 10) V a.c. or
  200 to 240 (± 10) V a.c.
Power consumption at start up 0.55 kVA
Pump weight 13 kg
Controller weight 7 kg