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iGX600M

Activair.cz > Products > Vacuum pumps and vacuum stations > Semiconductor Pumps > iGX Dry Pumps > iGX600M
iGX600M - iGX Dry Pumps
The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

Features and Benefits

  • Reduced Cost of Ownership
    • Up to a 50% reduction in utilities cost compared to iL/iH drypumps
    • No preventative maintenance
  • Flexible Installation Options
    • Small and light for easy installation
    • On-tool, close proximity, or remote
  • Possible Tool Throughput Improvements
    • One of the fastest load lock pumps available
  • Consistent Pumping Performance Globally
    • Pumping speed identical at 50 and 60 Hz
  • Reduced Ambient Noise
    • Only 55 dB(A)
  • Wide Range of Peak Speed
    • 100, 300, 600 and 800 m3h-1

Applications

  • Load Lock
  • Transfer
  • Metrology
  • Lithography
  • PVD Process
  • PVD Pre-Clean
  • RTA
  • Strip/Ashing
  • Oxide Etch
  • Silicon Etch
  • Metal Etch
  • Implant Source
Technical data  
Peak speed 620 m3h-1
  365 cfm
  10333 l min-1
Ultimate pressure 7.00E-04 mbar
  5.25E-04 Torr
  0.07 Pa
Power at 700 Torr exhaust  
Ultimate 1.6 kW
AUC (Active Utility Controller) 0.05 kW
Water inlet* 2 slm
Nitrogen 4 or 14 slm
Footprint excluding exhaust 0.20 m2
Weight 220 kg
Inlet connection ISO100
Outlet connection NW25
Noise at ultimate < 55 dB(A)

* Requires constant flow valve accessory.