The digital vacuum transducer VSI with cold cathode sensor measures absolute pressure in the high vacuum range.
Measurement principles | Magnetron/Cold cathode |
---|---|
Gas dependency | depending on gas type |
Measurement range Torr | 1.5e-3 – 5e-9 Torr |
Measuring range Torr | 1.5e-3 - 5e-9 Torr |
Max, Overpressure resistance | 10 bar abs., 16 bar abs. with CERT31P |
Accuracy | 2e-3 – 2e-8 mbar: 25 % f. r. |
Response time | 50 ms (switch-on cold cathode |
Materials in contact with vacuum | Edelstahl 1.4307, tungsten, nickel, glass, molybdenum, Al₂O₃ ceramic |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | 1x M12 A / 2x M12 D, female |
Article Number (choice of vacuum connection) | DN 25 ISO-KF (VSI17), DN 40 CF-F (VSI19), DN 40 ISO-KF (VSI18) |
Dimensions | 139 x 69 x 48 mm (VSI17) |
Protection class | IP54 |
Weight (kg) | 555 g (VSM77) |
Power consumption | Max. 2,5 W, add. 0,8 W f. EtherCAT/ Relais/ LCD, add. 1.6 W f. Profinet |
Electrical connection | 1x M12 A / 2x M12 D, female |
Bake out temperature | Max. 160 °C at the flange (voltage supply switched-off) |
max. overload with CERT31P | up to 16 bar abs. |
Filaments / anodes | Molybdenium |
anode voltage | < 2.5 kV |
Category | Vacuum transducer |
Serial interfaces | EtherCAT, RS485 |