The Inline 250 uses two high capacity cartridges inline, which maximizes the use of cartridge reagent and boosts the capacity of Inline 250 by 150% compared to the M150.
 
The technology used in the Inline 250 has been proven to give the highest abatement performance of any dry technology for etch.
 
The high temperature treatment gives permanent gas destruction and removal of halogens, acid gases and other halide etch components. It safely treats toxic organochloride by-products frequently exhausted from etch tools.