iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.

Features and Benefits

  • Class leading chamber pump down time reduces Total Average Cycle Time (TACT)
  • Only 0.55kW power consumption helps minimise customer cost of ownership
  • Green Mode can reduce power consumption by up to 92% during idle periods
  • Up to 35oC water supply helps reduce facility cooling water requirements
  • Extremely small and light, helping to save valuable fab space
  • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
  • Unique dual inlet arrangement allows efficient foreline routing and location options
  • Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs
Technical data  
Peak speed 110 m3h-1
  65 cfm
  1833 lmin-1
Ultimate pressure (typical) 0.013 mbar
  0.009 Torr
  1.3 Pa
Power at ultimate 0.55 kW
Power in Green Mode 0.045 kW
Inlet connection  
Vertical ISO63
Horizontal NW50
Outlet connection NW25
Cooling water connection Optional
Water flow 1 lmin-1
Weight 59 kg