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STP-XA4503C

Activair.cz > Products > Vacuum pumps and vacuum stations > Turbomolecular pumps > STP Turbo Pumps > High Flow and High Throughput STP Pumps > STP-XA4503C
STP-XA4503C - High Flow and High Throughput STP Pumps

The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.

Features and Benefits

  • Advanced Rotor Design
    • Increased Argon performance
    • Highest pumping speed in its class
    • Wide process window
    • Higher throughput at lower pressure
    • Maintenance free
    • Harsh process compatible
  • 5-axis Magnetic Suspension System
    • Zero contamination
    • Low vibration
    • High reliability
  • Optimized Temperature Distribution
    • Low deposition
    • Built-in cooling mechanism
    • Higher gas throughput
    • Increased operating life
  • Certifications
    • Conforms to international safety standards
    • UL listed, CE marked and SEMI® S2 compliant
Technical data  
Inlet flange size VF300, ISO320F, VG350
Backing port size KF40
Pumping speed  
N2 3800 to 4300 ls-1 (dependant on model)
H2 2500 ls-1
Compression ratio  
N2 >108
H2 6 x 103
Ultimate pressure 10-7 Pa / 10-9 mbar
Max allowable backing pressure 266 Pa / 2.66 mbar
Max allowable gas flow N2
(Water cooled only)		 2800 sccm (4.73 Pam3s-1)
Maximum allowable gas flow Ar
(Water cooled only)		 2150 sccm (3.63 Pam3s-1)
Rated speed 24000 rpm
Run up time to 90% rated speed 12 minutes
Mounting position Any orientation
Water cooling  
Flow 3 lmin-1
Temperature 5 – 25 °C / 41 – 77 °F
Pressure 0.3 MPa
Recommended purge gas flow N2 50 sccm / 8.4 x 10-2 Pam3s-1
Input voltage 200 – 240 ±10 % V a.c.
Maximum input power (without TMS) 1.5 KVA