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iH160HTX

Activair.cz > Products > Vacuum pumps and vacuum stations > Semiconductor Pumps > iH Dry Pumps > iH160HTX
iH160HTX - iH Dry Pumps
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

Features and Benefits

  • Optimized utilities consumption.
  • No preventative maintenance required.
  • Cantilevered shafts and specially profiled rotors for better handling of particles.
  • Reserve motor power also maximizes reliability on harsh-duty CVD applications.
  • Corrosion resistant materials allow pumping of corrosive gases.
  • Higher operating temperatures provide ample margin to prevent gas condensation.
  • The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint.

Applications

  • Load Lock
  • Transfer
  • Metrology
  • Lithography
  • PVD Process
  • PVD Pre-clean
  • RTA
  • Strip/Ashing
  • Etching
  • Implant Source
  • HDP CVD
  • RTP
  • SACVD
  • MCVD
  • PECVD
  • LPCVD
  • ALD
Technical data  
Peak Speed 165 m3h-1
  97 cfm
  2750 l min-1
Ultimate Vacuum 1 x 10-2 mbar
  7.5 x 10-3 Torr
  1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet Connection ISO63
Outlet Connection NW40
Typical cooling water flow at 15 psi pressure drop 120 l h-1
  2 l min-1
Weight 244 kg
Power input at ultimate 3.1 kW
Rated motor power 5.0 kW
Oil Capacity 0.85 l

 All figures are typical without gas ballast.