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Activair.cz > Products > Vacuum pumps > Semiconductor Pumps > EPX Dry Pumps > EPX180N
EPX180N
Features and Benefits
- Compact footprint - as one of the smallest on-tool pumps available, the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred.
- Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.
- Unique patent protected pumping mechanism
- Ultra clean mechanism
- Extremely reliable
- Network compatible
Applications
- Load Lock
- Transfer Chamber
- PVD sputtering
- Ashing/PR Strip
- Dieletric Etch
| Technical data | |
| Peak speed | 170 m3h-1 |
| 105 ft3min-1 | |
| 2835 lmin-1 | |
| Ultimate vacuum | |
| -4mbar | |
| -5Torr | |
| -2Pa | |
| Warm-up time (to nominal performance) | 30 min |
| Inlet flange | ISO63 |
| Outlet flange | NW25 |
| Noise | |
| Water connectors | 3/8 in Quick |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 – 35 °C |
| Nitrogen supply interface | 1/4 in (6.5 mm) tube |
| Nitrogen supply pressure | 3 x 105 – 7 x 105 pa |
| Minimum nitrogen purity | 99.95% |
| Electrical Supply | 200/208 V, 50/60 Hz 3 phase |
| Power at ultimate | 1.4 kW |
| Rated motor power | 3.0 kW |
| TIM | C3 |
| Weight | 43.5 kg |
- EPX high vacuum dry pumps datasheet (pdf, 713KB)
