Headquarters
- Activair s.r.o.
Ostravská 311/7
747 70 Opava-Komárov
Czech Republic
| Tel: | +420 595 171 552
|
| Fax: | +420 226 013 984 |
| E-mail: | |
| ID: | 28605837
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| VAT: | CZ28605837 |
| ID data: | 3bngrkk
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Branch Brno
- Activair s.r.o.
Bohunická 728/24a
619 00 Brno - Horní Heršpice
Czech Republic
| Tel: | +420 545 210 455
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| Fax: | +420 226 013 984 |
| E-mail: |
Branch Praha
-
Activair s.r.o.
Novodvorská 803/82
142 00 Praha 4 – Lhotka
Czech Republic
| Tel: | +420 222 362 288
|
| Fax: | +420 226 013 984 |
| E-mail: |
Slovakia
- Activair SK s.r.o.
Cementarenska cesta 16
974 01 Banska Bystrica
Slovakia
| Tel: | +421 948 422 022
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| Fax: | +420 226 013 984 |
| E-mail: |
Activair.cz > > > > >
EPX180N
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of -5 Torr.
Features and Benefits
- Compact footprint - as one of the smallest on-tool pumps available, the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred.
- Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.
- Unique patent protected pumping mechanism
- Ultra clean mechanism
- Extremely reliable
- Network compatible
Applications
- Load Lock
- Transfer Chamber
- PVD sputtering
- Ashing/PR Strip
- Dieletric Etch
| Technical data | |
| Peak speed | 170 m3h-1 |
| 105 ft3min-1 | |
| 2835 lmin-1 | |
| Ultimate vacuum | |
| <1 x 10-4 mbar | |
| <7,5 x 10-5 Torr | |
| <1 x 10-2 Pa | |
| Warm-up time (to nominal performance) | 30 min |
| Inlet flange | ISO63 |
| Outlet flange | NW25 |
| Noise | <59 dB(A) |
| Water connectors | 3/8 in Quick |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 – 35 °C |
| Nitrogen supply interface | 1/4 in (6.5 mm) tube |
| Nitrogen supply pressure | 3 x 105 – 7 x 105 pa |
| Minimum nitrogen purity | 99.95% |
| Electrical Supply | 200/208 V, 50/60 Hz 3 phase |
| Power at ultimate | 1.4 kW |
| Rated motor power | 3.0 kW |
| TIM | C3 |
| Weight | 43.5 kg |
- EPX high vacuum dry pumps datasheet (pdf, 713KB)
