XDD1 Diaphragm Pumps

The XDD1 diaphragm pumps are used for backing small compound turbo-molecular pumps in clean, high vacuum applications.

Features and Benefits

  • Dry pumping, oil free turbomolecular backing pump with no oil disposal issues
  • Compact and lightweight with a small footprint
  • Worldwide a.c. voltage or 24 V d.c.
  • On/off switch
  • EN 60320 connector on AC pumps
  • Edwards Turbo and Instrument Controller (TIC) compatible
  • Low power
  • CSA/UL approved


  • RGA
  • Mass spectrometers
  • Cryostat and Dewar evacuation
  • Ion pump evacuation
  • Surface science
Technical data  
Pumping Speed  
50Hz 1.2 m3h-1
60Hz 1.4 m3h-1
50Hz 0.6 m3h-1 600 rpm
60Hz 1.4 m3h-1 1700 rpm (Factory setting); 1.7 m3h-1 2200 rpm
Ultimate vacuum (typical) <2 mbar
Ambient temperature limit 10 to 40 °C
Inlet connection NW16
Exhaust connection The pump is fitted with a silencer which can be removed and an exhaust line connected with a 1/8 inch BSP fitting
Max allowed inlet pressure 1 bar
Power connector IEC EN60320 C13
Motor power  
a.c. 80 W
d.c. 64 W
a.c. 6.5 kg
d.c. 4.1 kg