The digital vacuum transducer VSI with cold cathode sensor measures absolute pressure in the high vacuum range.
| Measurement principles | Magnetron/Cold cathode |
|---|---|
| Gas dependency | depending on gas type |
| Measurement range Torr | 1.5e-3 – 5e-9 Torr |
| Measuring range Torr | 1.5e-3 - 5e-9 Torr |
| Max, Overpressure resistance | 10 bar abs., 16 bar abs. with CERT31P |
| Accuracy | 2e-3 – 2e-8 mbar: 25 % f. r. |
| Response time | 50 ms (switch-on cold cathode |
| Materials in contact with vacuum | Edelstahl 1.4307, tungsten, nickel, glass, molybdenum, Al₂O₃ ceramic |
| Operating temperature | +5…+50°C (Profinet) |
| Storage temperature | -40…+65 °C |
| Voltage supply | 20 – 30 VDC |
| Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
| Electrical connection | 1x M12 A / 2x M12 D, female |
| Article Number (choice of vacuum connection) | DN 25 ISO-KF (VSI17), DN 40 CF-F (VSI19), DN 40 ISO-KF (VSI18) |
| Dimensions | 139 x 69 x 48 mm (VSI17) |
| Protection class | IP54 |
| Power consumption | Max. 2,5 W, add. 0,8 W f. EtherCAT/ Relais/ LCD, add. 1.6 W f. Profinet |
| Bake out temperature | Max. 160 °C at the flange (voltage supply switched-off) |
| max. overload with CERT31P | up to 16 bar abs. |
| Filaments / anodes | Molybdenium |
| anode voltage | < 2.5 kV |
| Category | Vacuum transducer |
| Serial interfaces | Profinet, RS485 |