• High Abatement Performance
  • Capable of treating gases from FPD generation 8+ process tools
  • Efficient abatement of deposition and chamber cleaning gases
• Proven Superior Reliability
  • Corrosion resistant system
  • Excellent powder handling for high flow silane applications
  • High uptime as proven in major FPD and solar cell operations worldwide
• Risk Management
  • Combustion of all flammable gases
  • Air-cooled design as standard
• Low Cost of Ownership
  • Minimum fuel gas consumption for full process gas abatement
  • Up to six process gas inlets
  • No water or oxygen required
  • Low power consumption
  • Low nitrogen consumption
  • 800 and 3000 slm capacity versions

The Spectra-Z system is a cost-effective, reliable, high performance exhaust treatment solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.