Spectra Z

The Spectra-Z system is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD) and Solar Cell manufacturing processes.

Features and Benefits

  • High Abatement Performance
    • Capable of treating gases from FPD generation 8+ process tools
    • Efficient abatement of deposition and chamber cleaning gases
  • Proven Superior Reliability
    • Corrosion resistant system
    • Excellent powder handling for high flow silane applications
    • High uptime as proven in major FPD and solar cell operations worldwide
  • Risk Management
    • Combustion of all flammable gases
    • Air-cooled design as standard
  • Low Cost of Ownership
    • Minimum fuel gas consumption for full process gas abatement
    • Up to six process gas inlets
    • No water or oxygen required
    • Low power consumption
    • Low nitrogen consumption
    • 800 and 3000 slm capacity versions

Applications

The Spectra-Z system is a cost-effective, reliable, high performance exhaust treatment solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.
  Spectra-Z 800 Spectra-Z 3000
Maximum gas flow rate 800 slm 3000 slm
Number of inlet ports 1 to 6 1 to 6
Electrical supply 200-208 VAC 3-phase 200-208 VAC 3-phase
Frequency 50/60 Hz 50/60 Hz
Power consumption 4 kW 6 kW
Nitrogen supply pressure 6-8 bar 6-8 bar
Fuel gas supply pressure 137 mbar (2 psi) 137 mbar (2 psi)
Extract flow rate 60 Nm 3/min 180 Nm3/min
Mass 850 Kg 1,450 Kg