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- Products
- Vacuum pumps and vacuum stations
- Dry vacuum pumps (R&D)
- Rotary vane pumps
- Turbomolecular pumps
- T-Station
- Diaphragm Pumps
- D-LAB
- GEMINI
- MP (physical applications)
- MPC (chemical applications)
- ATEX Approved MPC
- MPC (ultimate pressure less than 2 mbar)
- MPC (ultimate pressure less than 75 mbar)
- MPC 090 E, 90...260VAC /18VDC
- MPC 110 E, 90...260VAC /24V
- MPC 1201 E, 230/400V 50/60Hz
- MPC 1201 E, 230V 50/60Hz
- MPC 201 E, 230V 50/60Hz
- MPC 2401 E, 230/400V 50/60Hz
- MPC 2401 E, 230V 50/60Hz
- MPC 301 E, 230V 50/60Hz
- MPC 302 E, 230V 50/60Hz
- MPC 601 E, 230/400V 50/60Hz
- MPC 601 E, 230V 50/60Hz
- MPC 602 E, 230/400V 50/60Hz
- MPC 602 E, 230V 50/60Hz
- MPC (ultimate pressure less than 8 mbar)
- XDD1
- Ion and Getter Pumps
- Cryopumps
- Chemical pumps
- Semiconductor Pumps
- Claw vacuum pumps
- Dry vacuum pumps (GV)
- Diffusion Pumps
- Mechanical Boosters
- EH Mechanical Booster Pumps
- HV mechanical boosters pumps
- Stokes 1700
- Stokes 6"
- 607 5H10
- 607 5HR
- 607 5HR CE 7.5kW
- 607 5V10
- 607 5VR
- 607 5VR CE 7.5kW
- 607 MH05
- 607 MH20
- 607 MHR
- 607 MHR CE
- 607 MV05
- 607 MV20
- 607 MVR
- 607 MVR CE
- 615 5H15
- 615 5HR
- 615 5HR CE 11kW
- 615 5V15
- 615 5VR
- 615 5VR CE 11kW
- 615 MH10
- 615 MH15
- 615 MHR
- 615 MHR CE
- 615 MV10
- 615 MV15
- 615 MVR
- 615 MVR CE
- 61B 5H25
- 61B 5HR
- 61B 5HR CE 18.5kW
- 61B 5V25
- 61B 5VR
- 61B 5VR CE 18.5kW
- 61B MH10
- 61B MH25
- 61B MHR
- 61B MHR CE
- 61B MV10
- 61B MV25
- 61B MVR
- 61B MVR CE
- 622 5H25
- 622 5HR
- 622 5HR CE 18.5kW
- 622 5V25
- 622 5VR
- 622 5VR CE 18.5kW
- 622 MH25
- 622 MHR
- 622 MHR CE
- 622 MV25
- 622 MVR
- 622 MVR CE
- Exhaust management
- Vacuum valves
- Air admittance valves
- Ball valves
- Electromagnetic valves
- Manual valves
- Pneumatic valves
- Speedivalve
- Vacuum measurement & control
- Digital Controllers
- Gauges
- Measurement
- 1 channel, 115V, for Analogline transducers with 4-20 mA output, USB, analog output 0-1 V / 0-10V
- 1 channel, 230V, for Analogline transducers with 4-20 mA output, USB, analog output 0-1 V / 0-10V
- 2 channels, 95 - 265V, for Smartline transducers and Analogline transducers with 0-10 V output, USB interface and RS232 interface
- 4 channels, 1200-5e-10 mbar, for Smartline transducers and Analogline transducers with 0-10 V output, USB interface and RS232 interface
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, display
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, EtherCAT
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, Profinet
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF, display
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF, EtherCAT
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40CF, Profinet
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF, display
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF, EtherCAT
- Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN40KF, Profinet
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF, display
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF, EtherCat
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN25KF, Profinet
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40 CF, EtherCat
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40 CF, Profinet
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40CF
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40CF, display
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, display
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, EtherCat
- Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, Profinet
- Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN25KF
- Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN25KF, display
- Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN40CF
- Piezo / Pirani, 1200-5e-4 mbar, USB-interface
- Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, Display
- Piezo, 1600-1 mbar, DN16KF with G1/4 female thread, USB-interface
- Pirani external, 100-1e-3 mbar, 1/8" NPT-thread USB-interface
- Pirani external, 100-1e-3 mbar, DN16KF, USB-interface
- Pirani, 100-5e-4 mbar, metal sealed, DN16KF USB-interface
- Pirani, 1000-1e-4 mbar, metal sealed, DN16KF, display
- Leak detection
- Oils and fluids
- Blowers
- Laboratory technique
- Filtration
- Inlet Vacuum Pump Filters
- CT Series 1" - 6" BSPP
- CSL Series 3" - DN300 BSPT, Flange
- CSL Series 3/8" - 3" BSPP
- FST Series 1½" - 8" Multi-App Filters
- ISO CSL Series NW16 - NW40 Flg (Black Finish)
- ISO Flg Vacuum Filters, CSL Series (Electroless Nickel Finish)
- IVPL Series 3"-12" Lateral Access "L" Style Filters
- IVPS Series 3"-12" Lateral Access Straight Through Style
- SpinMeister ST Series
- ST Series, See-Through Vacuum Filter
- VL Series 3"- 6" MPT (BSPT)
- VL Series 4" - 6" Flange
- VS Series 3" - 6" MPT (BSPT)
- VS Series, 4" - 6" Flange
- Inlet Filter Assemblies
- Big Boy F Series DN200 - DN300 Flange
- CSS Series 1/4" - 1"
- F Series 3" - 6" BSPT
- F Series DN80 - DN150
- FT Series 1/2" - 3" BSPT
- FT Series 3" - 6" Flange
- FT Series DN200 - DN300, Flange PN10
- FT Series DN80 - DN150, PN10 & 16
- SM Series 1"- 2-1/2"SpinMeister Extreme Duty Filters
- SM Series 1/2" - 1" SpinMeister
- SM Series 4" SpinMeister Extreme Duty Filters
- SM Series DN125 - DN300 SpinMeister Extreme Duty Filters
- Inlet Filter Silencers
- Sumo Class Filter Silencers
- BBF Series 2"-6" Silencer Frame for PD Blowers
- Belt Guard for BBF Series Base Frame
- Big Boy Filter Silencers, QB Series DN200 - DN300
- Big Boy FS Series 6"-14" Flange Filter Silencers
- EFS Series-Discharge Silencer
- FS Series 1/2" - 3" Filter Silencers
- FS Series 1/4"-1" Filter Silencers
- FS Series 3" - 6" Filter Silencers
- FS Series DN80 - DN150, PN Pattern Flange
- LQB Series 3" BSPT - DN300 Flg
- Multibarrel Filter Silencers
- PS Series Plastic Filter Silencers
- QB Series Compact Filter Silencers
- QB Series DN80 - DN150 Filter Silencers
- SLCR / SLCRT Series 1/2" - 4" FPT (BSPP) Silencers
- Snubber Discharge/Intake Silencer
- Air / Oil Separators
- ATS Series Vacuum Discharge Sump & Separator Tank
- Crankcase Ventilation System
- CVB Series
- CVH Series, Static Vent Breathers
- EE/SV Series 3/8" BSPP, ISO Flg
- EF Series 1/2" - 1 3/4", ISO Flanges
- EFDB Series
- HDL Series 1" - 2 1/2" BSPP
- HDL Series 3" BSPT - DN200 Flange
- Suction Scrubber Vessels
- VAE Series, Vacuum Assisted Oil Mist Eliminator
- Filter Elements
- Wire Mesh Elements, "S" Media
- 1 Micron Polyester Elements, "Z" Media
- 100 Micron Polyester Elements, "W" Media
- 25 Micron Polyester Elements, "U" Media
- 4 Micron Polyester Elements, "N" Media
- ACG Media
- Activated Alumina Elements, "AA" Media
- Activated Carbon Elements, "AC" Media
- Blower Filter Elements, 32 Series
- Coalescing Elements for Oil Mist Eliminators
- Compact / Big Boy Series Replacement Element
- Electrostatic, Odor Adsorptive Elements, "GM" Media
- HEPA Elements w/SS ID/OD, "HE" Media
- HEPA Elements w/SS ID/OD/EC, "HE" Media
- HEPA Elements, "HE" Media
- Hockey Puck Filter Elements for Miniature Filter Assemblies
- J Series, Polyester/Paper Media with SS ID/OD
- K Series, Polyester/Paper Media with SS ID/OD
- Low Pressure Drop WP Media Coalescing Elements
- Nomex Elements, "MX" Media
- Polypropylene Elements, "Y" Media
- Polyurethane Foam Elements, "FXF" Media
- PPS Elements, "RY" Media
- PTFE Elements, "TF" Media
- Q Series, Polyester/Paper Media with SS ID/OD/EC
- R Series, Polyester/Paper Media with SS ID/OD/EC
- Replacement Elements 60 - 510 m3/h Flow Range
- Small Vacuum Pump Elements, 800 Series
- Special Sized Filter Elements
- SS Nomex Element, "MXD" Media
- SS Screen Elements, "XXWSS" Media
- SS Wire Mesh Elements, "S2" Media
- Top Hat Style Separators, 51 Series
- ULPA "UL" Media
- Parts/Accessories
- Specialty Applications
- Inlet Vacuum Pump Filters
- Spare Parts
- Vacuum pumps and vacuum stations
- Services
- Markets
- Research and Development
- Vývoj zařízení pro prostorovou dezinfekci pomocí HOCl s pokročilým řídícím software
- Držák vzorku pro moderní depoziční procesy
- Výzkum a vývoj elektrovodivých keramických kompozitních povlaků
- Technologie kombinovaného zdroje plasmatu pro vznik pokročilých povrchových úprav
- Bezobslužné vakuové zařízení pro servis transformátorů
- Glass-ceramic innovation ecosystem for implementation of new research directions in applications (GlaCerHub)
- Inteligentní imisní měření v okolí produktovodů a průmyslových aplikací pomocí dronu
- Vývoj centrální jednotky pro vakuové systémy odpadních vod
- Výzkum a vývoj filtračního zařízení pro elektroizolační kapaliny s využitím vysoce funkčních keramických materiálů
- Výzkum a vývoj pokročilého interakčního vakuového systému pro laserovou spektroskopii
- Výzkum a vývoj technologie pro výrobu vakuových komponent nekonvenčními postupy
- Technical Information
- Download
STPA1603C
The small and powerful STPA1603C turbo-molecular pump has been designed using advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes.
Features and Benefits
- Advanced rotor design
- Increased performance
- Higher gas throughput
- High reliability
- Maintenance free
- Harsh process compatible
- 5 Axis Magnetic Suspension System
-
Zero contamination
-
Low vibration
- Corrosion Resistant
-
Harsh process compatible
-
Increased life
- Compact design
-
Small footprint
-
Half rack controller
- Advanced controller design
-
Auto tuning
-
Self diagnostic functions
-
d.c. motor drive
-
Battery-free operation
Applications
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
| Technical data | |
| Inlet flange | ISO200F |
| Outlet port | KF40 |
| Purge port | KF16 |
| Water cooling fitting | PT1/4 |
| Pumping Speed | |
| N2 | 1600 ls-1 |
| H2 | 1200 ls-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | >7 x 103 |
| Ultimate pressure with bake out heating | 10-7 Pa |
| Max allowable backing pressure | 266 Pa (2 Torr) |
| Max Nitrogen throughput | 2500 sccm |
| Rated speed | 36500 rpm |
| Starting time | 7 min |
| Mounting position | Any |
| Water cooling flow | 2 lmin-1 |
| Temperature | 5-25 °C |
| Pressure | 0.3 MPa |
| Recommended purge gas flow | 20 sccm |
| Input voltage | 200 to 240 (± 10) V a.c. |
| Power consumption | 0.85 kVA |
| Pump weight | 35 kg |
| Controller weight | 9 kg |
- Edwards Maglev Turbos and the Environment Brochure (pdf, 1057KB)