Cold cathode, 2e-3-5e-9 mbar, metal sealed, DN40KF, Profinet


The digital vacuum transducer VSI with cold cathode sensor measures absolute pressure in the high vacuum range

Measurement principles Magnetron/Cold cathode
Gas dependency depending on gas type
Measurement range Torr 1.5e-3 – 5e-9 Torr
Measuring range Torr 1.5e-3 - 5e-9 Torr
Max, Overpressure resistance 10 bar abs., 16 bar abs. with CERT31P
Accuracy 2e-3 – 2e-8 mbar: 25 % f. r.
Response time 50 ms (switch-on cold cathode
Materials in contact with vacuum Edelstahl 1.4307, tungsten, nickel, glass, molybdenum, Al₂O₃ ceramic
Operating temperature +5…+50°C (Profinet)
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection 1x M12 A / 2x M12 D, female
Article Number (choice of vacuum connection) DN 25 ISO-KF (VSI17), DN 40 CF-F (VSI19), DN 40 ISO-KF (VSI18)
Dimensions 139 x 69 x 48 mm (VSI17)
Protection class IP54
Power consumption Max. 2,5 W, add. 0,8 W f. EtherCAT/ Relais/ LCD, add. 1.6 W f. Profinet
Bake out temperature Max. 160 °C at the flange (voltage supply switched-off)
max. overload with CERT31P up to 16 bar abs.
Filaments / anodes Molybdenium
anode voltage < 2.5 kV
Category Vacuum transducer
Serial interfaces Profinet, RS485