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Activair.cz > Products > Vacuum pumps > Semiconductor Pumps > GX Dry Pumps > GX100N
GX100N
Features and Benefits
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Reduced Cost of Ownership
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Up to a 50% reduction in utilities cost compared to iL/iH drypumps
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No preventative maintenance
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Flexible Installation Options
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Small and light for easy installation
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On-tool, close proximity, or remote
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Possible Tool Throughput Improvements
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One of the fastest loadlock pumps available
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Consistent Pumping Performance Globally
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Pumping speed identical at 50 and 60 Hz
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Reduced Ambient Noise
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Only 55 dB(A)
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Wide Range of Peak Speed
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100, 300, 600 and 800 m3h-1
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Applications
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-clean
- RTA
- Strip/Ashing
- Oxide Etch
- Metal Etch
- Implant Source
| Technical data | |
| Performance | |
| Peak speed | 105 m3h-1 |
| 62 ft3min-1 | |
| 1750 lmin-1 | |
| Ultimate pressure | 5 x 10-3 mbar |
| 3.75 x 10-3 Torr | |
| 0.5 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water * | |
| Water inlet | 1 slm |
| Nitrogen | 0 slm |
| Installation Details | |
| Footprint (excluding exhaust) | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO 63 |
| Outlet connection | NW25 |
* Requires Constant Flow Valve accessory
- GX Next Generation Dry Pumps (pdf, 588KB)
