Headquarters
- Activair s.r.o.
Sadová 189/44
746 01 Opava-Predmesti
Czech Republic
| Tel: | +420 595 171 552
|
| Fax: | +420 226 013 984 |
| E-mail: | |
| ID: | 28605837
|
| VAT: | CZ28605837 |
| ID data: | 3bngrkk
|
Branch Brno
- Activair s.r.o.
Marianske nam. 617/1
617 00 Brno
Czech Republic
| Tel: | +420 545 210 455
|
| Fax: | +420 226 013 984 |
| E-mail: |
Branch Praha
- Change of address!
Activair s.r.o.
Novodvorská 803/82
142 00 Praha 4 – Lhotka
Czech Republic
| Tel: | +420 222 362 288
|
| Fax: | +420 226 013 984 |
| E-mail: |
Slovakia
- Activair SK s.r.o.
Cementarenska cesta 16
974 01 Banska Bystrica
Slovakia
| Tel: | +421 948 422 022
|
| Fax: | +420 226 013 984 |
| E-mail: |
Activair.cz > > > > >
GX100N
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
Features and Benefits
-
Reduced Cost of Ownership
-
Up to a 50% reduction in utilities cost compared to iL/iH drypumps
-
No preventative maintenance
-
-
Flexible Installation Options
-
Small and light for easy installation
-
On-tool, close proximity, or remote
-
-
Possible Tool Throughput Improvements
-
One of the fastest loadlock pumps available
-
-
Consistent Pumping Performance Globally
-
Pumping speed identical at 50 and 60 Hz
-
-
Reduced Ambient Noise
-
Only 55 dB(A)
-
-
Wide Range of Peak Speed
-
100, 300, 600 and 800 m3h-1
-
Applications
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-clean
- RTA
- Strip/Ashing
- Oxide Etch
- Metal Etch
- Implant Source
| Technical data | |
| Performance | |
| Peak speed | 105 m3h-1 |
| 62 ft3min-1 | |
| 1750 lmin-1 | |
| Ultimate pressure | 5 x 10-3 mbar |
| 3.75 x 10-3 Torr | |
| 0.5 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water * | |
| Water inlet | 1 slm |
| Nitrogen | 0 slm |
| Installation Details | |
| Footprint (excluding exhaust) | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO 63 |
| Outlet connection | NW25 |
| Noise at ultimate | <55 dB(A) |
* Requires Constant Flow Valve accessory
- GX Next Generation Dry Pumps (pdf, 588KB)
