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Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, EtherCAT

Activair.cz > Products > Vacuum measurement & control > Measurement > Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, EtherCAT

VSM77E

The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.

Measurement principles	Combination sensors, Magnetron/Cold cathode
Gas dependency	depending on gas type
Measuring range mbar	1000 - 5e-9 mbar
Measurement range Torr	750 – 5e-9 Torr
Measuring range Torr	750 - 5e-9 Torr
Max, Overpressure resistance	10 bar abs., 16 bar abs. with CERT31P
Accuracy	1000 – 10 mbar: approx. 30 % f. r. \| 10 – 2e-3 mbar: 10 % f. r. \| 2e-3 – 1e-8 mbar: 25 % f. r.
Response time	50 ms (switch-on cold cathode
Repeatability	10 – 1e-2 mbar: ca. 2% f. r. \| 1e-2 – 1e-8 mbar: ca. 7% f. r.
Materials in contact with vacuum	Edelstahl 1.4307, tungsten, nickel, glass, molybdenum, Al₂O₃ ceramic
Operating temperature	+5…+60 °C
Storage temperature	-40…+65 °C
Voltage supply	20 – 30 VDC
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection	1x M12 A / 2x M12 D, female
Article Number (choice of vacuum connection)	DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79), DN 40 ISO-KF (VSM78)
Dimensions	139 x 69 x 48 mm (VSM77)
Protection class	IP54
Weight (kg)	555 g (VSM77)
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Bake out temperature	Max. 160 °C at the flange (voltage supply switched-off)
max. overload with CERT31P	up to 16 bar abs.
Filaments / anodes	Molybdenium
anode voltage	< 2.5 kV
Category	Vacuum transducer
Serial interfaces	EtherCAT, RS485