Cold cathode / Pirani, 1000-5e-9 mbar, metal sealed, DN25KF, EtherCAT

VSM77E

The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.

Measurement principles Combination sensors, Magnetron/Cold cathode
Gas dependency depending on gas type
Measuring range mbar 1000 - 5e-9 mbar
Measurement range Torr 750 – 5e-9 Torr
Measuring range Torr 750 - 5e-9 Torr
Max, Overpressure resistance 10 bar abs., 16 bar abs. with CERT31P
Accuracy 1000 – 10 mbar: approx. 30 % f. r. | 10 – 2e-3 mbar: 10 % f. r. | 2e-3 – 1e-8 mbar: 25 % f. r.
Response time 50 ms (switch-on cold cathode
Repeatability 10 – 1e-2 mbar: ca. 2% f. r. | 1e-2 – 1e-8 mbar: ca. 7% f. r.
Materials in contact with vacuum Edelstahl 1.4307, tungsten, nickel, glass, molybdenum, Al₂O₃ ceramic
Operating temperature +5…+60 °C
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection 1x M12 A / 2x M12 D, female
Article Number (choice of vacuum connection) DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79), DN 40 ISO-KF (VSM78)
Dimensions 139 x 69 x 48 mm (VSM77)
Protection class IP54
Weight (kg) 555 g (VSM77)
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Bake out temperature Max. 160 °C at the flange (voltage supply switched-off)
max. overload with CERT31P up to 16 bar abs.
Filaments / anodes Molybdenium
anode voltage < 2.5 kV
Category Vacuum transducer
Serial interfaces EtherCAT, RS485