The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Measurement principles | Combination sensors, Magnetron/Cold cathode |
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Gas dependency | depending on gas type |
Measuring range mbar | 1000 - 5e-9 mbar |
Measurement range Torr | 750 – 5e-9 Torr |
Measuring range Torr | 750 - 5e-9 Torr |
Max, Overpressure resistance | 10 bar abs., 16 bar abs. with CERT31P |
Accuracy | 1000 – 10 mbar: approx. 30 % f. r. | 10 – 2e-3 mbar: 10 % f. r. | 2e-3 – 1e-8 mbar: 25 % f. r. |
Response time | 50 ms (switch-on cold cathode |
Repeatability | 10 – 1e-2 mbar: ca. 2% f. r. | 1e-2 – 1e-8 mbar: ca. 7% f. r. |
Materials in contact with vacuum | Edelstahl 1.4307, tungsten, nickel, glass, molybdenum, Al₂O₃ ceramic |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | 1x M12 A / 2x M12 D, female |
Article Number (choice of vacuum connection) | DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79), DN 40 ISO-KF (VSM78) |
Dimensions | 139 x 69 x 48 mm (VSM77) |
Protection class | IP54 |
Weight (kg) | 555 g (VSM77) |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Bake out temperature | Max. 160 °C at the flange (voltage supply switched-off) |
max. overload with CERT31P | up to 16 bar abs. |
Filaments / anodes | Molybdenium |
anode voltage | < 2.5 kV |
Category | Vacuum transducer |
Serial interfaces | EtherCAT, RS485 |