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Spectra-G

Activair.cz > Products > Vacuum pumps and vacuum stations > Exhaust management > Spectra-G
Spectra-G - Exhaust management

The Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.

Features and Benefits

  • High Abatement Performance
    • Capable of treating all exhaust gases from multiple MOCVD production tools
    • Unique combustion technology allows abatement of NH3 while minimizing NOx emissions
  • Proven Superior Reliability
    • Excellent powder handling for high throughput applications
    • High uptime as proven in leading nitride MOCVD production operations
    • Proven on all leading OEM’s applications
  • Risk Management
    • Combustion of all flammable gases
    • Air-cooled design as standard
  • Low Cost of Ownership
    • Minimum fuel gas consumption for full process gas abatement
    • Up to six process inlets
    • Alternative fuel options
    • No water or oxygen requirement
    • Low power consumption
    • Low nitrogen consumption
    • 800 slm capacity
    • Indoor or outdoor installations
Technical data  
Maximum gas flow rate 800 slm
Number of inlet ports 1 to 6
Electrical supply 200-208 VAC 3-phase
Frequency 50/60 Hz
Power consumption 4 kW
Nitrogen supply pressure 7 bar
Fuel gas supply pressure 137 mbar (2 psi)
Extract flow rate 60 Nm 3/min
Mass 850 Kg