nEXT85

The nEXT85 turbomolecular pump builds upon the success of the EXT75DX to deliver a pump with significantly improved performance in a smaller package.

Features and benefits

  • Class leading performance in a reduced footprint
  • Enhanced customer choice with standard and compression focused variants
  • Increased operating envelope maximised by Edwarď patented direct impeller temperature measurement technology
  • Additional flexibility from customised interstage and backing port position selection
  • 4 years between services with full end-user field serviceability
  • CMSD enabled low vibration levels
  • Intelligent pumps with included micro USB port and Edwards nST software allowing pump monitoring, control and configuration
  • Full suite of tailored accessories
 

nEXT85D

NW40

nEXT85H

NW40

nEXT85D

ISO63

nEXT85H

ISO63

nEXT85D

CF63

nEXT85H

CF63

nEXT85D

ISO100

nEXT85H

ISO100

Main inlet pumping speed
N2 ls-1 47 47 84 84 84 84 86 86
He ls-1 61 61 78 78 78 78 80 78
H2 ls-1 49 44 60 54 60 54 60 54
Ar ls-1 44 44 80 80 80 80 84 84
Peak compression ratio from the backing port to the main inlet port
N2 >1011 >1011 >1011 >1011 >1011 >1011 >1011 >1011
He 8x106 2x107 8x106 2x107 8x106 2x107 8x106 2x107
H2 2x105 2x105 2x105 2x105 2x105 2x105 2x105 2x105
Ar >1011 >1011 >1011 >1011 >1011 >1011 >1011 >1011
Ultimate pressure (mbar) <5x10-9 <5x10-9 <5x10-9 <5x10-9 <5x10-10 <5x10-10 <5x10-9 <5x10-9
Mass 2,9 kg 2,9 kg 3,0 kg 3,0 kg 4,4 kg 4,4 kg 3,2 kg 3,2 kg