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nEXT85

The nEXT85 turbomolecular pump builds upon the success of the EXT75DX to deliver a pump with significantly improved performance in a smaller package.

Class leading performance in a reduced footprint
Enhanced customer choice with standard and compression focused variants
Increased operating envelope maximised by Edwarď patented direct impeller temperature measurement technology
Additional flexibility from customised interstage and backing port position selection
4 years between services with full end-user field serviceability
CMSD enabled low vibration levels
Intelligent pumps with included micro USB port and Edwards nST software allowing pump monitoring, control and configuration
Full suite of tailored accessories

	nEXT85D NW40	nEXT85H NW40	nEXT85D ISO63	nEXT85H ISO63	nEXT85D CF63	nEXT85H CF63	nEXT85D ISO100	nEXT85H ISO100
Main inlet pumping speed
N2 ls^-1	47	47	84	84	84	84	86	86
He ls^-1	61	61	78	78	78	78	80	78
H2 ls^-1	49	44	60	54	60	54	60	54
Ar ls^-1	44	44	80	80	80	80	84	84
Peak compression ratio from the backing port to the main inlet port
N₂	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹
He	8x10⁶	2x10⁷	8x10⁶	2x10⁷	8x10⁶	2x10⁷	8x10⁶	2x10⁷
H₂	2x10⁵	2x10⁵	2x10⁵	2x10⁵	2x10⁵	2x10⁵	2x10⁵	2x10⁵
Ar	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹	>10¹¹
Ultimate pressure (mbar)	<5x10^-9	<5x10^-9	<5x10^-9	<5x10^-9	<5x10^-10	<5x10^-10	<5x10^-9	<5x10^-9
Mass	2,9 kg	2,9 kg	3,0 kg	3,0 kg	4,4 kg	4,4 kg	3,2 kg	3,2 kg