| Technical data | |
| Smallest Detectable Leak Rate (Pa . m3/s) | ≤5 x 10-12 |
| Leak Rate Display (Pa . m3/s) | 5 x 10-12 ∼ 1 x 10-4 |
| Maximum inlet pressure (Pa) | 1000 |
| Response Time (s) | ≤2 |
| Run-up Time (min) | 4 |
| Power | 200V±10%, 50Hz, single-phase, 10A |
| Ambient Temperature | 5∼35°C, relative humidity ≤80% |
| L x W x H (mm) | 800 x 421 x 925 |
| Weight (kg) | 70 |