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EPX180NE

Activair.cz > Products > Vacuum pumps and vacuum stations > Semiconductor Pumps > EPX Dry Pumps > EPX180NE
EPX180NE - EPX Dry Pumps

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of -5 Torr.

Features and Benefits

  • Compact footprint - as one of the smallest on-tool pumps available, the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred.
  • Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.
  • Unique patent protected pumping mechanism
  • Ultra clean mechanism
  • Extremely reliable
  • Network compatible

Applications

  • Load Lock
  • Transfer Chamber
  • PVD sputtering
  • Ashing/PR Strip
  • Dieletric Etch
Technical data  
Peak speed 170 m3h-1
  105 ft3min-1
  2835 lmin-1
Ultimate vacuum  
  <1 x 10-4 mbar
  <7,5 x 10-5 Torr
  <1 x 10-2 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO63
Outlet flange NW25
Noise <59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 – 35 °C
Nitrogen supply interface 1/4 in (6.5 mm) tube
Nitrogen supply pressure 3 x 105 – 7 x 105 pa
Minimum nitrogen purity 99.95%
Electrical Supply 400 V, 50/60 Hz 3 phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM None
Weight 43.5 kg