SIPV40P, pneumatic, bellows sealed


Soft-start, pneumatically operated, valves with interchangeable orifices for the controlled pumpdown of processes where turbulent flow can cause problems with particulate contamination.

Features and Benefits

  • MTTF of 5000000 cycles
  • Controlled pump down to match process
  • Aluminum bodies
  • 100% grease free vacuum
  • Fast acting valves in the event of power failure
  • Bellows sealed for clean operation
  • Easy to service with replaceable orifices
  • Supplied with 5 mm, 6 mm and 7 mm interchangeable orifices
  • Bakeable to 100 °C to prevent condensation of process gases


  • When the slave valve is opened gas flows at a low rate between the two sides of the valve through interchangeable orifices allowing slow pumping. Having reached a predetermined pressure level specified by the user, the master valve is opened by means of a user supplied signal allowing full bore pumping.
    The bellows sealed valves are single acting with pneumatic opening and spring closure.
  • They are supplied with three interchangeable orifices to enable pumping characteristics to be matched to your process.
  • A microswitch is supplied as standard to indicate valve status. Both the valve and the microswitch can be baked to 100°C to speed up degassing, and to prevent process gases from condensing inside the valve.
  • While designed primarily for the semiconductor industry the valve can also be used in other applications requiring controlled pump-down.
Technical data  
Valve actuation type Single acting, pneumatically opened, spring closed
Pressure range 1 x 10-9 to 2100 mbar
  8 x 10-10 to 1575 Torr
Maximum pressure differential  
Opening 1000 mbar / 750 Torr
Closing 2100 mbar / 1575 Torr
Leak rate 10-9 mbar ls- 1
  10-10 Torr ls- 1
Pneumatic connector Rp 1/8 ( 1/8 inch BSP)*
Pneumatic operating pressure 2.8 to 4.2 bar / 41 to 61 psi
Electrical indicator Single microswitch
Microswitch electrical rating 24 V, 1.5 A a.c. or d.c.
Max cycle frequency 900 h-1
Bellows reliability, MTTF 5000000 cycles
Ambient operating temperature 5 - 100 °C
Maximum baking temperature 100 °C
Construction materials HE30TF aluminum
O-ring Fluoroelastomer
Time to open/close at 4 bar (ms) SIPV40P
Slave valve 60/20
Master valve 50/155
Weight (g / oz)  
SIPV40P 1760 / 62

*  With optional control valve fitted