The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation valves. They have been designed, in conjunction with VAT, to enable pumps to be kept running during foreline maintenance in order to maximise the reliability and up-time of pumps operating on harsh processes. The BGV valves are designed for an operating pressure range of 1 x 10-9 mbar to 1.2 bar absolute (1 x 10-7 to 1.2 x 105 Pa). The valves withstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differential pressure across the valve seal.
Although principally designed for isolation of pumps in a semiconductor fab basement, the BGV valves are ideal for other applications where a 1 bar differential at opening is desirable and 20000 cycles is acceptable.
Technical data | |
Leak rate | |
Body | < 1 x 10-9 mbar ls-1 |
Valve seat | < 1 x 10-7 mbar ls-1 |
Pressure range | 1 x 10-9 mbar to 1.2 bara |
Differential pressure on the gate | 1.2 bar in either direction |
Differential pressure at opening | 1 bar |
Cycles until first service | 5000 |
Maximum operating temperatures | |
Valve body | 120 °C |
Manual actuator | 80 °C |
Pneumatic actuator | 80 °C |
Position indicator | 60 °C |
Solenoid | 50 °C |
Molecular flow conductance | |
NW50 | 300 ls-1 |
ISO63 | 400 ls-1 |
ISO80 | 1100 ls-1 |
ISO100 | 1700 ls-1 |
ISO160 | 4600 ls-1 |
Weight | |
NW50 | 3.3 kg (7.3 lbs) |
ISO63 | 6.6 kg (14.6 lbs) |
ISO80 | 7.0 kg (15.4 lbs) |
ISO100 | 8.5 kg (18.7 lbs) |
ISO160 | 17.7 kg (39.0 lbs) |
Materials of construction: | |
Body | AISI 304 stainless steel |
Bonnet | Black anodized aluminum |
Gate | AISI 304 stainless steel |
Gliders | PEEK |
Bellows | AISI 633 stainless steel |
Seals | Fluoroelastomer |
Gate fixation screw | A2 stainless steel Ni-teflon coated |
Handle | Reinforced polyamide |
Pneumatic valves | |
Solenoid rating | |
Standard solenoid | 24 V - 15% / + 10%, AC/DC, 2.4 W |
Position indicator contact rating | 12 - 30 V AC/DC, max 500 mA, max 10 W |
Pneumatic supply | |
Min supply pressure | 58 psig (4 bar gauge, 5 bar absolute, 5 x 105 Pa) |
Max supply pressure | 100 psig (7 bar gauge, 8 bar absolute, 8 x 105 Pa) |
Pneumatic connection | R1/8 inch (1/8 inch NPT for valves ordered in USA) |