BGV manual gate valve ISO80

The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation valves. They have been designed, in conjunction with VAT, to enable pumps to be kept running during foreline maintenance in order to maximise the reliability and up-time of pumps operating on harsh processes. The BGV valves are designed for an operating pressure range of 1 x 10-9 mbar to 1.2 bar absolute (1 x 10-7 to 1.2 x 105 Pa). The valves withstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differential pressure across the valve seal.
Although principally designed for isolation of pumps in a semiconductor fab basement, the BGV valves are ideal for other applications where a 1 bar differential at opening is desirable and 20000 cycles is acceptable.

Features and Benefits

  • Jointly developed with VAT, a world leader in sealing technology.
  • Stainless steel construction and robust patented design for a long service life
  • Simple grease-free mechanism minimizes damage due to particulates in dusty processes
  • Can be operated with 1 bar pressure differential so pressure equalization is not required
  • Easy servicing with only inexpensive consumables for low cost of ownership
  • Smooth surfaces for easy cleaning
  • Available with solenoid fitted and wired for easy ordering and installation
  • Plug and play compatible with Edwards semiconductor dry pump when used with optional BGV TIM interface cable.
Technical data  
Leak rate  
Body < 1 x 10-9 mbar ls-1
Valve seat < 1 x 10-7 mbar ls-1
Pressure range 1 x 10-9 mbar to 1.2 bara
Differential pressure on the gate 1.2 bar in either direction
Differential pressure at opening 1 bar
Cycles until first service 5000
Maximum operating temps  
Valve body 120°C
Manual actuator 80°C
Pneumatic actuator 80°C
Position indicator 60°C
Solenoid 50°C
Molecular flow conductance  
NW50 300 ls-1
ISO63 400 ls-1
ISO80 1100 ls-1
ISO100 1700 ls-1
ISO160 4600 ls-1
NW50 3.3 kg (7.3 lbs)
ISO63 6.6 kg (14.6 lbs)
ISO80 7.0 kg (15.4 lbs)
ISO100 8.5 kg (18.7 lbs)
ISO160 17.7 kg (39.0 lbs)
Materials of construction:  
Body AISI 304 stainless steel
Bonnet Black anodized aluminium
Gate AISI 304 stainless steel
Gliders PEEK
Bellows AISI 633 stainless steel
Seals Fluoroelastomer
Gate fixation screw A2 stainless steel Ni-teflon coated
Handle Reinforced polyamide
Manual Valves  
Turns of the handle to open/close  
NW50 22
ISO63 27
ISO80 33
ISO100 39
ISO160 41