T-Station 85 is a low cost, compact turbomolecular pumping station that seamlessly combines the nEXT85H turbomolecular pump with either a dry diaphragm or oil sealed backing pump, and a simple controller, providing pumping speeds of 47 to 84 ls-1.
Technical data | |
Pumping speed for N2 | 47 ls-1 |
ISO/CF63 | 84 ls-1 |
Compression ratio for N2 | >1 x 1011 |
Backing pump speed @ 50 Hz | |
E2M1.5 (TS85H Wet) | 1,6 m3h-1 |
XDD1 (TS85H Dry) | 1,2 m3h-1 |
Ultimate vacuum | <5 x 10-8 mbar |
Inlet flange | NW40, ISO63 or CF63 |
Exhaust flange | |
E2M1.5 (TS85H Wet) | 11 mm OD nozzle or 3/8" BSP |
XDD1 (TS85H Dry) | Fitted silencer or 1/8" BSP |
Mass | |
E2M1.5 system (TS85H Wet) | 21 kg max |
XDD1 system (TS85H Dry) | 17 kg max |
Noise level |
≤56 dB(A) |
Leak tightness |
<1x10-6 mbar ls-1 |
Operating temperature range |
12 to 40°C |