The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
| Measurement principles | Combination sensors, Bayard Alpert/Hot Cathode |
|---|---|
| Gas dependency | depending on gas type |
| Measuring range mbar | 1000 - 5e-10 mbar |
| Measurement range Torr | 750 – 5.0e-10 Torr |
| Measuring range Torr | 750 - 5.0e-10 Torr |
| Max, Overpressure resistance | 4 bar abs. |
| Accuracy | 1000 … 10 mbar: ca. 30 % f. r. | 10 … 1e-8 mbar: 10 % f. r. |
| Response time | 50 ms (switching of emission current |
| Repeatability | 10 – 1e-2 mbar: 2 % f. r. | 1e-2 – 1e-8 mbar: 5% f. r. |
| Materials in contact with vacuum | Stainl. steel 1.4307, tungsten, nickel, glass, platinum, iridium, yttria oxide |
| Operating temperature | +5…+60 °C |
| Storage temperature | -40…+65 °C |
| Voltage supply | 20 – 30 VDC |
| Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
| Electrical connection | SubD 15pole, male |
| Article Number (choice of vacuum connection) | DN 25 ISO-KF (VSH87), DN 40 CF-F (VSH89), DN 40 ISO-KF (VSH88) |
| Dimensions | 141 x 69 x 48 mm (VSH88) |
| Protection class | IP40, IP54 mit connector XB15SL05 |
| Weight (kg) | 475 g (VSH88) |
| Output Signal SL | 0 – 10 VDC, min. 10 kΩ, measuring range 1,219 – 8,6 VDC, log. except EtherCAT, Profinet |
| Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
| Switching output | 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet |
| Electrical connection | SubD 15pole, male |
| Bake out temperature | Max. 180°C at the flange (voltage supply switched-off) |
| Filaments / anodes | Yttria coated iridium |
| Emission current | 9 μA, 100 μA, 1.0 mA, 2,0 mA |
| Degas method | Ohmic heating of the anode |
| Category | Vacuum transducer |
| Output signal | 0-10 V |
| Serial interfaces | RS485 |