Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN40CF

VSH89D

The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.

Measurement principles Combination sensors, Bayard Alpert/Hot Cathode
Gas dependency depending on gas type
Measuring range mbar 1000 - 5e-10 mbar
Measurement range Torr 750 – 5.0e-10 Torr
Measuring range Torr 750 - 5.0e-10 Torr
Max, Overpressure resistance 4 bar abs.
Accuracy 1000 … 10 mbar: ca. 30 % f. r. | 10 … 1e-8 mbar: 10 % f. r.
Response time 50 ms (switching of emission current
Repeatability 10 – 1e-2 mbar: 2 % f. r. | 1e-2 – 1e-8 mbar: 5% f. r.
Materials in contact with vacuum Stainl. steel 1.4307, tungsten, nickel, glass, platinum, iridium, yttria oxide
Operating temperature +5…+60 °C
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection SubD 15pole, male
Article Number (choice of vacuum connection) DN 25 ISO-KF (VSH87), DN 40 CF-F (VSH89), DN 40 ISO-KF (VSH88)
Dimensions 141 x 69 x 48 mm (VSH88)
Protection class IP40, IP54 mit connector XB15SL05
Weight (kg) 475 g (VSH88)
Output Signal SL 0 – 10 VDC, min. 10 kΩ, measuring range 1,219 – 8,6 VDC, log. except EtherCAT, Profinet
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Switching output 2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet
Electrical connection SubD 15pole, male
Bake out temperature Max. 180°C at the flange (voltage supply switched-off)
Filaments / anodes Yttria coated iridium
Emission current 9 μA, 100 μA, 1.0 mA, 2,0 mA
Degas method Ohmic heating of the anode
Category Vacuum transducer
Output signal 0-10 V
Serial interfaces RS485