Request form
EXT75iDX Turbo Pump
Features and Benefits
- Compatible with TIC turbo and instrument controller
- Multiple communication modes available including parallel mode, which allows traditional control signal interface and serial mode, which allows RS232 interface
- Numerous user configurable parameters via RS232 interface including vent valve control settings, normal speed indication, stand-by running speed, programmable power settings, power consumption and pump temperature.
- Enhanced monitoring capability including pump speed, power and temperature.
| Technical data | |
| Inlet flange | DN63ISO-K, DN63CF, DN40NW or DN100ISO-K |
| Pumping Speed | |
| N2 ISO63/63CF (DN40NW)(ISO100) | 61 ls-1 (42 ls-1) (66 ls-1) |
| He ISO63/63CF (DN40NW)(ISO100) | 57 ls-1 (49 ls-1) (59 ls-1) |
| H2 ISO63/63CF (DN40NW)(ISO100) | 53 ls-1 (48 ls-1) (54 ls-1) |
| Compression ratio | |
| N2 | >1 × 1011 |
| He | 1 x 106 |
| H2 | 5 x 104 |
| Ultimate Pressure (mbar) | |
| With RV backing pump ISO/CF | -9/ 5 x 10-10 |
| With diaphragm backing pump ISO/CF | -8/ 5 x 10-9 |
| Outlet flange | DN16NW |
| Recommended backing pump* | RV5/nXDS6i |
| Vent port | 1/8 inch BSP |
| Purge port | 1/8 inch BSP |
| Max continuous inlet pressure (light gas pumping)† | |
| Water cooling (water at 15 °C, ambient temp at 40 °C) | 2 × 10-2 mbar |
| Forced air cooled, 35 °C ambient | 1 × 10-2 mbar |
| Pump rotational speed | |
| Nominal rotational speed | 90000 rpm |
| Standby rotational speed | Variable from 49500 to 90000 rpm (63000 rpm default) |
| Programmable power limit settings | Variable from 50-120W (80W default) |
| Start time to 90% speed | 110 s ‡ |
| Analogue outputs | Rotational speed; Power consumption; Pump temp; Controller temp |
| Cooling method# | Forced air / water |
| Ambient air temperature for forced air cooling | 5 - 35 °C |
| Min cooling water flow rate (water 15 °C) | 15 l h-1 |
| Water temp range | 10 - 20 °C |
| Max inlet flange temp | 100 °C |
| Operating attitude | Vertical and upright, through to Horizontal |
| Noise level at 1 metre | |
| Max magnetic field pump can tolerate | 5 mT |
| Recommended controller | TIC100 turbo and instrument controller |
| Quiescent electrical power | 10 W |
* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate † Above this inlet pressure, rotational speed drops to below nominal.
‡ Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately
- EXT75 Turbomolecular Pump Datasheet (pdf, 746KB)