Headquarters
- Activair s.r.o.
Ostravská 311/7
747 70 Opava-Komárov
Czech Republic
Tel: | +420 595 171 552
|
Fax: | +420 226 013 984 |
E-mail: | |
ID: | 28605837
|
VAT: | CZ28605837 |
ID data: | 3bngrkk
|
Branch Brno
- Activair s.r.o.
Bohunická 728/24a
619 00 Brno - Horní Heršpice
Czech Republic
Tel: | +420 545 210 455
|
Fax: | +420 226 013 984 |
E-mail: |
Branch Praha
-
Activair s.r.o.
Novodvorská 803/82
142 00 Praha 4 – Lhotka
Czech Republic
Tel: | +420 222 362 288
|
Fax: | +420 226 013 984 |
E-mail: |
Slovakia
- Activair SK s.r.o.
Cementarenska cesta 16
974 01 Banska Bystrica
Slovakia
Tel: | +421 948 422 022
|
Fax: | +420 226 013 984 |
E-mail: |
Activair.cz > > > > >
EXT75iDX Turbo Pump
The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either a DN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N2 pumping speed of up to 66ls-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.
Features and Benefits
- Compatible with TIC turbo and instrument controller
- Multiple communication modes available including parallel mode, which allows traditional control signal interface and serial mode, which allows RS232 interface
- Numerous user configurable parameters via RS232 interface including vent valve control settings, normal speed indication, stand-by running speed, programmable power settings, power consumption and pump temperature.
- Enhanced monitoring capability including pump speed, power and temperature.
Technical data | |
Inlet flange | DN63ISO-K, DN63CF, DN40NW or DN100ISO-K |
Pumping Speed | |
N2 ISO63/63CF (DN40NW)(ISO100) | 61 ls-1 (42 ls-1) (66 ls-1) |
He ISO63/63CF (DN40NW)(ISO100) | 57 ls-1 (49 ls-1) (59 ls-1) |
H2 ISO63/63CF (DN40NW)(ISO100) | 53 ls-1 (48 ls-1) (54 ls-1) |
Compression ratio | |
N2 | >1 × 1011 |
He | 1 x 106 |
H2 | 5 x 104 |
Ultimate Pressure (mbar) | |
With RV backing pump ISO/CF | -9/ 5 x 10-10 |
With diaphragm backing pump ISO/CF | -8/ 5 x 10-9 |
Outlet flange | DN16NW |
Recommended backing pump* | RV5/nXDS6i |
Vent port | 1/8 inch BSP |
Purge port | 1/8 inch BSP |
Max continuous inlet pressure (light gas pumping)† | |
Water cooling (water at 15 °C, ambient temp at 40 °C) | 2 × 10-2 mbar |
Forced air cooled, 35 °C ambient | 1 × 10-2 mbar |
Pump rotational speed | |
Nominal rotational speed | 90000 rpm |
Standby rotational speed | Variable from 49500 to 90000 rpm (63000 rpm default) |
Programmable power limit settings | Variable from 50-120W (80W default) |
Start time to 90% speed | 110 s ‡ |
Analogue outputs | Rotational speed; Power consumption; Pump temp; Controller temp |
Cooling method# | Forced air / water |
Ambient air temperature for forced air cooling | 5 - 35 °C |
Min cooling water flow rate (water 15 °C) | 15 l h-1 |
Water temp range | 10 - 20 °C |
Max inlet flange temp | 100 °C |
Operating attitude | Vertical and upright, through to Horizontal |
Noise level at 1 metre | |
Max magnetic field pump can tolerate | 5 mT |
Recommended controller | TIC100 turbo and instrument controller |
Quiescent electrical power | 10 W |
* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate † Above this inlet pressure, rotational speed drops to below nominal.
‡ Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately
- EXT75 Turbomolecular Pump Datasheet (pdf, 746KB)